MEMS同位素微电池能量转换建模及性能分析

【作者】 秦冲；

【导师】 苑伟政；

【作者基本信息】 西北工业大学 ， 机械制造及其自动化， 2007， 硕士

【摘要】 随着MEMS技术的不断发展和进步，人们希望将各种微器件与能源部件集成在一起，形成一个具有独立工作能力、能长时间稳定工作的微系统，这就需要研究与MEMS工艺兼容、易于集成、工作稳定性好、使用寿命长的微能源。基于β辐生伏特效应的同位素微电池不需要外界为其提供燃料、能独立工作，结构简单、使用寿命长，采用MEMS工艺、易于集成，可以满足MEMS对微能源的要求。MEMS同位素微电池不仅扩展了其在MEMS领域发挥巨大作用，同时也促进了其在便携式能源领域的广泛应用。因此，基于β辐生伏特效应的同位素微电池具有重要的研究意义。 本文针对MEMS同位素微电池的能量转化结构进行了理论建模和理论分析，并对它的结构优化设计、性能分析、版图设计及加工工艺等一系列关键技术进行了研究。论文的主要研究内容包括： 1．建立了基于β辐生伏特效应的同位素微电池能量转换结构的理论模型及微电池的等效电路，推导出辐生电流、辐生电压、最大输出功率及能量转换效率的理论公式，分析得出影响微电池能量输出的主要参数：掺杂浓度、耗尽区宽度和结深。 2．研究了掺杂浓度、耗尽区宽度和结深对微电池能量输出性能的影响，并通过优化设计确定同位素微电池设计的一些主要性能参数。 3．研究了MEMS同位素微电池的输出特性、辐照特性、温度特性等电学特性，确定同位素微电池设计的一些主要性能参数。 4．采用MEMS微加工工艺对几种不同的微电池单元结构进行了版图和工艺设计，并在西北工业大学微／纳米系统实验室成功的制作了MEMS同位素微电池样件。更多还原

【Abstract】 As the development of MEMS (Micro Electro Mechanical System) investigation, a self-powered and long time stable working microsystem is expected, which integrates various micro components and micropower component. Thus, the research of micropower with advantage in micrbfabrication process compatibility, integration, stability, and lifetime is needed. Compared with chemical fuels and solar cells, betavoltaic microbattery using radioisotope thin film has been researched toward a solution of micropower supply with advantages in size, weight and endurance. In view of the characteristic of radioisotope microbattery based on betavoltaic effect, betavoltaic microbattery that has long lifetime, no need for fuel storage, and is easily integrated on-chip can reach the power supply needs of MEMS.In this thesis, the model of a betavoltaic energy converter was designed and some numerical simulations were made. In addition, several key technologies about the betavoltaic microbattery design were explored.Firstly, The theoretical model of radioisotope microbattery energy converter based on betavoltaic effect and the circuit model of microbattery were constructed respectively, and the calculation formulas of microbattery were concluded. It can be concluded that doping concentrations, width of depletion region, junction depth are crucial parameters that affect performance of microbattery.Secondly, the effects on the mirobattery output characteristic of doping concentrations, width of depletion region, junction depth were analyzed. In the analysis, the optimal values of the above parameters were numerically solved.Thirdly, the output characteristic, temperature characteristic and radioisotope radiation characteristic were analyzed. In the analysis, the optimal values of some cucial parameters were numerically solved.Finally, the corresponding microfabrication process and layouts of some kinds of更多还原