【作者】 胡洁微；

【导师】 任国臣；

【作者基本信息】 辽宁工学院 ， 控制理论与控制工程， 2007， 硕士

【摘要】 本文对传统的单晶硅加热电源进行了改进和升级,将数字控制器融入到单晶硅加热电源的控制中;并采用模糊PID控制算法,实现对热场温度的合理控制和调节;在温度测量环节,则设计了一种利用常见的低转换精度的D/A和A/D转换芯片搭建的高精度测量/转换电路,既使得现场检测到的温度信号误差最小、又使A/D转换器转换精度提高。本设计采用80C196KB单片机作为整个控制系统的控制核心,利用其强大的逻辑运算功能和控制功能实现CPU与上位机通信,对检测电信号的转换、运算等控制功能。设计可实现功能:参数的在线预置、修改与即时显示;为单晶的整个生长过程提供热量的数字化直流输出控制;带有模糊PID调节功能的温度控制;高精度的测量与转换控制;人机对话以及系统故障与报警诊断分析等功能。文中应用模拟电路、微机控制技术实现了对控温精度要求很高的直拉单晶硅炉温度控制系统的设计。实验结果表明,该设计可以提高温控系统的自动化程度,使其具有较高的控制精度,操作上简单可靠,可以满足单晶生长过程对温度的严格要求。更多还原

【Abstract】 A new improvement method of the traditional single crystal furnace heating power is put forward. The power control unit adopts digital controller which is built-in intelligent Fuzzy-PID control algorithm, and it is able to realize more rational control and adjustment. In the temperature measurement unit, a kind of high-precision measurement & conversion circuit is given, which can make the signal error smaller and the A/D transducer’s conversion accuracy higher.In this dissertation, 80C196KB is adopted as the control core. Its strong logic operation and control function are able to make the peripheral and the CPU work in phase. It also can deal with all the detected signals well. The design content includes: a intelligent power supply which provides quantity of heat during the single crystal growing process, a temperature controller with Fuzzy-PID, high-precision regulation of the measurement and conversion circuits, LCD/keys, protection and alarming circuits; meanwhile, the design idea of the software、flow chart and control arithmetic are given. This system has the functions of presetting and modifying parameters online and real-time display.The design of the single crystal furnace temperature control system is realized by analog electronic、microcomputer unit control skills. The result of the dissertation indicates that the system can improve the automatization degree, Which also can make the system operation easily and satisfy the temperature required by the crystal growing process.更多还原