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CVD法制备纳米碳管的计算机控制系统

Computer Control System of Producing Carbon Nanotubes with CVD

【作者】 王霞

【导师】 李德昌;

【作者基本信息】 西安电子科技大学 , 材料物理与化学, 2007, 硕士

【摘要】 纳米碳管自1990年被发现以来,由于其独特的结构特征与优异的性能,迅速成为国际研究的热点。由于化学气相沉积CVD(? Chemical? Vapor? Deposition)法产率高,设备简单,工艺参数易于控制,重复性好,与其它制备方法比较,CVD?法是最有望实现大批量的制备纳米碳管的方法。纳米碳管生产设备的可靠性、可控性对于纳米碳管的制备、质量提高、经济性提高具有非常重要的影响。因此本文将把重点放在制备纳米碳管的CVD设备的计算机自动控制方面。通过认真研究CVD法制备纳米碳管工艺的每一个细节,在集散控制思想的基础上,确定了控制系统的总体方案,将系统分成数据采集与处理模块、流量控制模块、温度控制模块、USB接口模块和PC应用等五个模块,通过PC协调各个模块相互配合,完成系统的控制任务。本系统中将数据采集和温度控制分开进行设计,不仅减轻了PC的负荷,大大提高了系统的控制执行效率,使系统模块化,便于维护与更新。

【Abstract】 Since carbon nanotubes (CNTs) were discovered in 1991, they are widely used allover the world due to their unique structure and excellent properties. Comparing toother methods to produced CNTs, Chemical Vapor Deposition(CVD) method is themost promising methods to produce carbon nanotubes by wholesale, because it canyield high productivity with simple equipments and easy-to-control technologyparameters. Both the controllable and the reliability of producing equipments play animportant part in production, quality prompt, economy control of CNTs. In this paper,we put our focus on the PC automation control of CNTs production.With the study of CVD techniques to produce CNTs, a distributed control systemusing industrial control computers was built. The system is composed of five modulesincluding the data acquiring and processing module, the temperature and flux controlmodule, the USB interface module and the PC module which is responsible forharmonizing the other modules to control the system. In the control system, the dataacquiring and processing module is separated from the temperature control module toreduce the burden of PC, improve the efficiency of system control and providemodularization and easy maintenance and update.

  • 【分类号】TB383.1
  • 【下载频次】120
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