【作者】 杜伟涛；

【导师】 张大卫；

【作者基本信息】 天津大学 ， 机械制造及其自动化， 2006， 硕士

【摘要】 本文以开发面向IC封装的高速、高精度定位系统为目标,以两自由度笛卡尔坐标型高速、高精度定位平台为对象,研究了提高其速度与精度的控制策略和方法,并建造出XY精密定位平台样机一台。取得如下成果:采用直线音圈电机直接驱动的两自由度笛卡尔坐标型高速、高精度定位平台,并采用新型弹性解耦机构,从而将驱动部件置于底座上,减轻了运动部件的重量,降低了惯量,同时具有传统XY精密定位平台运动学解耦的特点将X轴向和Y轴向定位平台等效为集中质量系统,分别建立了X轴向和Y轴向定位机构的动力学模型,并建立了直线音圈电机的动态方程。最终,结合系统特点,建立了系统的机电耦合模型。在系统机电耦合模型基础上,应用最小节拍响应控制策略进行控制,该方法以最小的超调量快速达到稳态响应的允许波动范围,并能持续保持在该波动范围内的时间响应为前提,对控制参数进行优化调整,最终得到理想的控制结果。理论分析和实验证明,能够满足封装设备的精度、速度需求。针对上述理论分析,采用激光干涉仪对平台进行实验分析,最终得出运动平台系统的性能指标。基于上述研究成果,建造出基于直线音圈电机直接驱动采用新型弹性解耦机构的XY精密定位平台样机一台。样机具有很高的运动速度和极高的运动加速度和定位精度,单轴机构稳定时间很短。目前,该样机已经通过国家高技术研究发展计划(863计划)专家组的验收。以上工作对于推动高速高精密芯片封装设备控制方法研究,拓展其工程应用具有重要的意义。更多还原

【Abstract】 Aimed at a two DOF high speed and high precision positioning table for IC packaging, this dissertation deals with the control strategies to enhance its speed and precise are presented. As a result, a prototype machine of XY table has been developed. The following creative works have been completed.A voice coil actuator direct-drive high speed and high precision XY table patented has been developed. A new flexible decoupling mechanism is proposed to use in the table. So the driving element can be mounted on the base and the moving inertia has been reduced. Meanwhile, the table is of conventional XY precision table kinematics decoupling characteristic.Considering the precision positioning table as lumped mass spring system, the dynamic model of X axial table and Y axial table has been developed respectively. The analytic solution of displacement step responses and displacement impulse responses of the X axial table and Y axial table have been given by use of Laplace transform method. The dynamic model of the linear voice coil actuator is formulated, too. The above outcomes the electro mechanical coupling control system of the positioning table.Based on the electro mechanical coupling control system of the positioning table, the minimum deadbeat response controlling algorithm is introduced to the control system to reduce the mechanical resonance at high acceleration and deceleration rates. From the result of the simulation and experiment, the positioning system used the above control algorithm has a favorable dynamic and static characteristic and robust.The Laser calibration system is put up to finish the experiment to get the capability parameter of the table.The above outcomes have been used for the development of a prototype machine of XY table. The XY table with high positioning accuracy and high dynamic performance also can reach very high speed and acceleration. The prototype machine has been checked and accepted by the expert committee of The National High Technology Research and Development Program of China (863 Program).更多还原