【作者】 张娜；

【导师】 褚金奎；

【作者基本信息】 大连理工大学 ， 机械电子工程， 2006， 硕士

【摘要】 本文采用微纳偏振敏感阵列模拟沙蚁复眼的构想，仿造沙蚁复眼结构设计制作微型偏振器，使具有高灵敏度、高精度、低功耗、微体积的仿生视觉传感器的研制成为可能。主要研究内容为金属光栅偏振器的设计仿真与偏光膜的制作测试，这两种偏振器件的研究为微纳导航系统的实现奠定了基础。 针对仿生微纳导航系统敏感波段0.52-0.59μm的要求，基于严格耦合波理论及Gsolver软件对金属光栅偏振器的结构进行设计并优化。分析了不同光栅材料、光栅面型及光栅结构参数对TM偏振透射率及透射消光比的影响，确定了最优的光栅结构参数。所设计的光栅与传统金属光栅不同之处在于基底和光栅之间增加了氟化镁介质，在垂直入射条件下，TM偏振透射率及消光比都增大。在0.38μm～0.40μm及0.50μm～0.76μm全光波段内，TM偏振透射率都大于50％，消光比都大于170，达到了宽带宽、TM偏振透射率及透射消光比都较高的要求。 采用流延法制备聚乙烯醇偏光膜，制作出具有良好偏振度和透光率的偏光膜。用Marc软件对偏光膜力学性能进行分析，建立偏光膜应力松弛模型及拉伸有限元模型，分析其应力值随拉伸比的变化情况及应力松弛现象。用紫外可见分光光度仪对偏光膜光学性能进行观察，结果表明偏光膜透光率和偏振度都随拉伸比的增大而增大。探索偏光膜光刻工艺，制作透光轴垂直的二维偏光膜，测得了良好的光学性能。这对偏光膜与光电薄膜的集成工艺有重要参考价值。更多还原

【Abstract】 In this thesis, the concept that micro-nano polarization sensitive arrays simulate the compound eyes of the desert ant is introduced.The structure of the compound eyes of the desert ant is simulated, and the micro-polarizer is designed and fabricated. So it is possible to develop a micro-bionic vision sensor that is high sensitivity, high accuracy and low power consumption.The design and the simulation of the wire-grid and the fabrication and the test of the polarizing film are mainly studied. The research of the two polarizers lays the foundation for the realization of the micro-nano navigation system.According to the request of the sensitive wave band of 0.52-0.59μm of the Bionic Micro-nano Navigation System, wire-grid is designed using the rigorous couple-wave theory, and its structure is designed and optimized by Gsolver software. Effects of different grating materials, grating shapes and grating parameters on the TM polarization transmission efficiency as well as the extinction ratio are analyzed, and the corresponding wire-grid polarizer is designed. When it works at the normal incidence, difference between the designed grating and conventional wire-grid is that the former adds the magnesium fluoride between the fundus and the grating, and the TM polarization transmission efficiency and the extinction ratio are increased.The TM polarization transmission efficiencies are more than 50 percentages and the extinction ratios are more than 170 when the incident wavelength is varied from 0.38μm to 0.40μm or from 0.50um to 0.76μm, which meets the expectations for wide band, high TM polarization transmission efficiencies and high transmission extinction ratios.Polarizing films are fabricated by the traditional method of flowing, and polarizing films with good polarization and transmission are produced. The mechanical capabilities of the polarizing films are analyzed using Marc software. The stress relaxation model and the stretch finite element model of the polarizing films are established, and the stress relaxation phenomenon and the change of the stress with the increase of the stretch ratio are analyzed.These polarizing films are studied by UV-VIS spectrophotometer. The results show that the transmission efficiency and the polarizing coefficient of the polarizing films have increased with the increase of the stretch ratio.The lithography technology of the polarizing films is studied.Two-phase polarizing films are formed of two transmission axises that are perpendicular to each other, and good optical performance is measured, Which are of更多还原