【作者】 张健；

【导师】 任春生；

【作者基本信息】 大连理工大学 ， 等离子体物理， 2006， 硕士

【摘要】 本实验采用自制Langmuir探针和发射光谱对柱面射频感应耦合氩气等离子体进行了诊断。实验中，研究了在线圈之间什么也不加时等离子体参数在一定功率下随气压在轴向、径向的变化规律，同时采用发射光谱测量了Ar原子和离子的发光强度随气压在轴向的变化规律。还研究了会切场对等离子体参数的影响，测量了有无会切场时等离子体参数在径向和轴向随气压和功率的变化规律，并且将测量的结果做了比较。 线圈之间什么都不加时，由Langmuir探针的测量结果可知在放电室中上部形成均匀稳定的高密度等离子体，但是在靶附近有所降低，并且在中部以下等离子体逐渐减弱；在径向6～7cm以内等离子体参数变化不大，参数在器壁处变化明显。并且采用发射光谱测量了等离子体中750.3nm的氩原子的发光强度随气压在轴向的变化规律，还得到了434.8nm的氩离子发光强度随气压在轴向的变化规律和434.8nm的氩离子与430.0nm的氩原子发光强度的比值在三个不同位置随气压的变化规律。 实验中还研究了会切磁场存在时对等离子体参数的影响。在实验中发现，当线圈之间加磁铁时存在功率吸收问题，为保证与加磁场时相同的条件，所以在线圈之间加不锈钢圈来代表无磁场时的情况，以实现相同的功率吸收。经Langmuir探针测量在线圈之间加会切场后等离子体密度在轴向逐渐增加，在顶部趋于饱和，并且密度值比无磁场时明显增加；在径向，等离体密度逐渐增加，在器壁附近达到最大值，且此处的磁场最强，在器壁处迅速降低，取得最小值。随着功率的增加，器壁处电子温度降低，密度增加，径向分布有更加均匀的趋势。当无磁场时，等离子体在径向逐渐降低，在器壁附近开始迅速降低，在器壁处取得最小值，磁场的存在使得等离子体径向分布更加均匀。实验中还研究了有无会切场存在时电子温度和等离子体电势随气压和功率的在轴向和径向的变化规律。等离子体参数的空间分布不均匀，与到靶的距离有关。更多还原

【Abstract】 For the experiment, the cylindrical radio frequency (rf) inductively coupled Argon plasma has been studied by Langmuir probe and emission spectrum. In the experiment, the parameters of the plasma varies with pressure in axial and radial direction has been measured which there is nothing adding between the antenna coils. The emission intensity of Ar atom and Ar~+ ion varies with pressure in axial direction were also measured. The effect of cusp magnetic field to plasma was studied. The plasma parameters with and without cusp magnetic field have measured which varies with pressure and power in axial and radial direction, and the comparisons of them are also showed.When nothing is added between antenna coils, by measuring it can know it produce uniform, stable and high density plasma in the middle and top of the discharge chamber, but it falls at the target, and below the middle of the chamber the plasma weakens slowly; in radial of 6-7 cm the plasma parameters are change slightly, also produce uniform stable plasma. The parameters change rapidly at the edge of the chamber. And using the emission spectra measured the intensity of Ar atom of 750.3 nm in plasma in axis with pressure, the intensity of Ar~+ ion of 434.8 nm varied with the pressure in the axis and the ratio of 434.8 nm Ar~+ ion to the 430.0 nm Ar atom varied with pressure in three position of the axis were also measured. The effect of the cusp magnetic field to the plasma has been studied in the experiment. In the experiment, it was found that when adding the magnets between the antenna coils, the rf power will be absorbed by them, for the same condition with adding cusp magnetic field so the condition of without cusp magnetic field is instead of by adding stainless steel rings. When adding the cusp magnetic field between the antenna coils, the plasma density increased gradually in axial direction. And the values are larger than without magnetic field obviously. In radial direction, the plasma density increased gradually, and reached its maximum near the chamber wall where the strength of the magnetic field is largest. But at chamber wall the plasma density decreased rapidly and reached the minimum. Without the cusp magnetic field, the plasma density decreased rapidly near the chamber and also reached the minimum at the wall. The plasma density increased and the distribution in radial direction became more uniform when adding the cusp magnetic field. In the experiment, the electron temperature plasma potential varied with pressure and power in axial and radial direction with and without更多还原