【作者】 张海军；

【导师】 褚金奎；

【作者基本信息】 大连理工大学 ， 机械制造及其自动化， 2006， 硕士

【摘要】 MEMS技术的不断发展，使人们制造出众多的MEMS器件和产品，但是如何给MEMS器件供能成了目前亟待解决的问题。传统的电池由于尺寸太大难以集成到MEMS产品中，同时MEMS装置迫切需要的不是大的功率而是长的使用寿命，因此对于长寿命微小型电池的研究非常有必要。 收集环境中的能量来给微系统供能引起了人们越来越多的关注。振动能在环境中随处可见，且没有污染，如果能够对其进行收集并加以利用，将是很好的发电方式。将振动能转换为电能的方式主要有电磁转换、静电转换、压电转换等等，本文主要探索了振动能到电能的压电转换方式。 本文意在设计一种带有质量块的硅微压电悬臂梁，当受到外界激励时，悬臂梁振动并弯曲，利用压电薄膜的正压电效应产生电荷，通过外电路对输出电荷进行收集和处理，从而作为微电池为微功耗器件供能。 论文首先对收集振动能的压电微电池进行结构设计和仿真。根据质量—弹簧—阻尼系统的振动原理得出要制作的微悬臂梁结构，根据材料力学和压电理论对该振动能收集系统进行简单的理论推导，并用有限元分析软件ANSYS进行仿真，通过模态分析和谐响应分析，得到悬臂梁的几何参数与系统的固有频率及输出电压的关系，为后续悬臂梁的制作提供了参考。 PZT铁电薄膜是实现机械能向电能转换的关键，本文采用溶胶—凝胶法来制备PZT铁电薄膜。通过反复实验，对溶胶的浓度、配比、水浴温度等参数进行调整，得到了透明澄清、性能稳定的PZT溶胶。通过改变甩胶的速度、时间，热处理的温度等参数，制得了表面平整、无裂纹的PZT薄膜，该PZT薄膜沿(111)方向择优生长，具有一定的压电性，可以用于微悬臂梁结构中进行能量的转换。 根据论文第二章仿真的结果，对制作悬臂梁所需的掩模版进行设计，并利用光刻、氧化、溅射、湿法腐蚀、剥离、ICP刻蚀等工艺，制备出集成了压电薄膜PZT的微悬臂梁结构，得到了一套可行的工艺方案。最后制备的悬臂梁电极有三明治结构和梳齿结构两种。更多还原

【Abstract】 As the development of MEMS, a lot of MEMS devices are manufactured, but how to power them becomes one of the most important problems. The traditional solution is to use batteries, but they are undesirable for many reasons: they tend to be quite bulky, contain a finite amount of energy, and have a limited shelf life. So it is very necessary to research long lifetime and microminiature cells.Energy harvesting from the environment has been actively explored using several methods. Most of all, mechanical vibration, existing everywhere around us and without pollution, is a potential power source which is easily accessible through MEMS technology. There are three basic mechanisms by which vibrations can be converted to electrical energy: electro-magnetic, electrostatic and piezoelectric. In this paper the piezoelectric conversion is explored to convert mechanical energy to electrical energy.A micro-cantilever beam with a seismic mass added to the end is designed in this paper. When the system is stimulated by ambient vibration sources, the mechanical structure deforms, stresses are then induced in the piezoelectric material and electric charge is generated with direct piezoelectric effect. Storing this kind of energy through capacitors or rechargeable batteries can be used as a micro battery to drive micro-power apparatus.Firstly the design and simulation of the piezoelectric micro battery are implemented. According to the theory of the mass-spring-damper system, the structure of the micro cantilever beam is established. The conversion theory is derived simply based on the material mechanics and piezoelectric theory. Using Finite-element analysis software ANSYS 8.1, the relations of geometric parameters of the cantilever beam vs natural frequencies and potential differences are obtained through modal analysis and harmonic analysis. This result can be used to design and manufacture the cantilever beam in the future.PZT ferroelectric film is a key technique for the conversion of mechanical energy to electrical energy. In this paper, Sol-Gel technique is employed to prepare a PZT piezoelectric thin film. Experimentally, by adjusting the concentration and mixture radio of the solution, temperature of the water bath and so on, the transparent and stable precursor solution is obtained. By changing the velocity and time of spin-coating, annealing temperature and otherwise, the PZT film shows good surfacing, without cracks, and preferred (111) orientation.更多还原