【作者】 高洁；

【导师】 马剑平；

【作者基本信息】 西安理工大学 ， 微电子学与固体电子学， 2006， 硕士

【摘要】 微机电系统(MEMS)基于现代科学技术微型化和智能化的发展趋势而产生，由微驱动器、微型传感器、信号处理和控制电路组成。作为MEMS的核心器件，微驱动器既要求材料性能优越，又要求应用设计尽可能合理。作为目前MEMS中普遍使用的Si材料，不能用于诸如高温，强辐射和强腐蚀性等极端环境下。碳化硅材料以其优越的电学、机械和化学性能成为替代硅材料的首选材料，受到越来越多研究者的关注。论文针对目前微执行器发展的趋势和需求，对多晶碳化硅材料静电梳齿驱动器，采用有限元分析方法进行了结构分析与优化设计。主要工作如下：第一，通过对目前MEMS发展状况，碳化硅材料的特性及其在MEMS中应用现状的分析，论证了设计分析多晶碳化硅材料静电梳齿驱动器的必要性。通过对静电梳齿驱动器原理的深入分析，获取了设计中用到的一些关键参数及指标。第二，使用有限元分析软件，建立10梳齿多晶碳化硅静电梳齿驱动结构的有限元模型，对该结构进行模态分析，得到了前6阶固有频率和振型。并将该结构与相同几何参数的硅静电梳齿驱动器进行了比较，结果表明，前者具有较高的固有频率，与理论预言相符合。通过对不同参数的多晶碳化硅静电梳齿器进行模态分析，系统分析了不同参数对结构固有频率的影响，为优化设计提供理论依据。第三，根据静电梳齿驱动器的性能指标，利用有限元软件，首先对多晶碳化硅静电梳齿驱动器的固有频率进行优化设计。其次，特别针对灵敏度进行了优化设计，得到灵敏度较高的结构参数。最后，在模态分析的基础上，对多晶碳化硅材料静电梳齿驱动器采用简化模型(ROM)，进行谐响应分析，谐振频率为113KHz，与模态分析结果相符。在10V驱动电压下最大位移达到0.11um。说明了设计的正确性。更多还原

【Abstract】 Micro-electro-mechanical system (MEMS) is developed based on the micromation and intelligentization tide of science technology. It is composed of several parts such as micro actuator、 micro sensor、 signal processing and control circuit. As MEMS of integral components, actuator not only needed superiority material, but also rationalization design. However, silicon, the most commonly used material for MEMS today, cannot be used as the structural material in harsh environments due to its well-know susceptibility to high temperature, radiation and corrosive chemicals. Compared with Si, due to its outstanding electrical, mechanical and chemical properties, silicon carbide (SiC) has gained great attention by researcher as both coating and structural materials for MEMS. According to the development of requirement and trend of the MEMS, Ploy-SiC electrostatic comb-drive actuator has been structural analyzed and optimized. The main research works as follows:Firstly, the paper discusses the necessity of designing and analyzing of Poly-SiC electrostatic comb-drive actuator by analyzing actual development of MEMS and SiC material Properties and application in MEMS. The electrostatic comb-drive actuator principle is analyzed deeply. Acquired some parameters of that be used in the design. At one time, finite element analysis methods and software have been summed up.Secondly, finite element analysis techniques for build model of Poly-SiC comb-driver with ten fingers actuator have been developed in this paper. The intrinsic frequencies and the first six vibration models of Poly-SiC electrostatic comb-drive actuator has been gained by model analysis. Know about the dynamic behavior of Poly-SiC electrostatic comb-drive actuators in different parameters. Compare with Poly-Si electrostatic comb-driver actuator, Poly-SiC one always has a higher intrinsic frequency. According to model analysis of different Poly-SiC electrostatic comb-drive actuator to provides evidence for optimum design.Finally, with combination of FEA and optimum design, we research a practical optimum design in accordance with capability index of Poly-SiC electrostatic comb-drive actuator. In order to get good performance, especially aim at sensitivity of Poly-SiC electrostatic comb-drive actuator, the paper has been developed optimum design. At the same time, based on the model analysis, Poly-SiC electrostatic comb-drive structures adopted reduced order model (ROM) in the paper. Harmonic response analysis of Poly-SiC comb-driver has been developed. The resonant frequency 113 KHz and maximum deflection 0.11um have been gained, which validates design correctness.更多还原