【作者】 李凌；

【导师】 蒋百灵；

【作者基本信息】 西安理工大学 ， 材料学， 2006， 硕士

【摘要】 为了成功的将闭合场非平衡磁控溅射离子镀技术制备的CrAlTiN镀层应用于铣刀,提高铣刀的使用寿命,本文选择了五种不同的基体偏压在分析试块上进行镀层制备。镀层性能的检测结果显示,随着基体偏压绝对值的升高,镀层的硬度、膜基结合力、耐磨性出现了先升高后降低的趋势。通过对比分析,结合被镀层铣刀的材质,选出75V、80V基体负偏压对应的镀层分别用于锯片铣刀和PCB用锣刀。使用结果表明,75V基体负偏压对应的镀层可提高铣刀硬度,防止铣刀与铜的粘结,将锯片铣刀使用寿命提高到3倍以上;80V基体负偏压对应镀层韧性好,抗PCB材料侵蚀,镀层后的锣刀使用寿命提高到4倍以上。在CrAlTiN镀层组织结构与相的测定中,SEM、TEM、XRD的综合结果显示:CrAlTiN镀层中的晶粒随着基体偏压绝对值的升高而细化;镀层中存在Cr2N及Ti2N两相,有可能存在CrN、TiN和AlN相;镀层中存在大量的非晶相,且非晶量随着基体偏压绝对值的升高而增多;镀层中晶粒细小,属于纳米尺寸,弥散分布于非晶相。更多还原

【Abstract】 The purpose of this paper is to apply CrAlTiN by CFUMSIP to milling cutter successfully. The paper chooses 5 different bias voltage and prepares different CrAlTiN coatings on the sample.The test result of coating performance shows that coating hardness,adhesion and wear resistance increase firstlty, then fall along with rise of minus bias voltage absolute value. We chooese 75V and 80V minus substrate bias voltage to apply to circular saw and milling cutter for PCB separately by comparing performance of different coating and analysis of milling cutter material.The result shows that CrAlTiN of 75V minus substrate bias voltage can improve hardness of circular saw and prevent cohering with Cu, so it improves work time more than 3 times than before; and that CrAlTiN of 80V minus substrate bias voltage used for PCB milling cutter has high toughness and doesn’t be corraded by PCB, so it improves work time more than 4 times than before.The analysis result of SEM、TEM and XRD during determination to coating structure and phase shows: grains in coating become more fine along with rise of minus bias voltage absolute value; CrAlTiN includes Cr2N and Ti2N, maybe include CrN、TiN and AlN by two analytical results of XRD and TEM; There are some amorphous grain in CrAlTiN.The content of amorphous grain increases along with rise of minus bias voltage absolute value; The grain in CrAlTiN whose size belongs to nano-scale distributes in amorphous grain.更多还原