【作者】 周英；

【导师】 严辉； 王波；

【作者基本信息】 北京工业大学 ， 材料物理与化学， 2006， 硕士

【摘要】 润湿性能是固体表面的重要特征之一,它是由表面的化学组成和微观几何结构共同决定的。无论是在工农业生产还是人们的日常生活中,润湿都是一种非常重要的现象,具有特殊润湿性和可控润湿性材料一直是人们关注的热点,比如超疏水材料(接触角大于150o)在窗户和天线的防雪防霜,汽车挡风玻璃的自清洁,以及生物细胞的活动等领域已经或者即将发挥极大的作用。作为一种经济适用并且环境友好的光电器件材料,非晶碳薄膜因其众多优良的特性而引起广泛研究兴趣。因此,辅之以特殊的润湿性能,非晶碳薄膜必将发挥更大的优势。本文采用磁控溅射系统在普通玻璃和单晶硅上获得了具有不同表面形貌特征的非晶碳薄膜,此外利用等离子体表面处理系统,通过改进工艺方法,优化工艺条件,对非晶碳薄膜表面化学组成进行调控,获得了润湿性能从超亲水到超疏水范围变化的表面。系统地研究了工艺参数对非晶碳薄膜的表面结构以及润湿性能的影响,此外还对非晶碳薄膜润湿性能的环境稳定性进行了评估。本论文的主要的研究工作进展如下:1.通过调控溅射工艺成功制备具有显著差异的表面形貌的非晶碳薄膜,其表面特征为从光滑平坦过渡到具有丰富的孔隙和极其复杂的皱褶的分形结构。而有趣的是,这种分形结构非常类似于自然界中荷叶的表面微观结构,这是目前在碳薄膜中首次发现具有这样特征的结构。对具有不同表面特征薄膜的润湿性能测试表明:仅仅通过工艺的调控,形貌的改变就可以使非晶碳薄膜的表面从非常亲水(接触角为40o)到超疏水(接触角为152o)大范围的浮动。2.通过计盒分维法将不同形貌的薄膜定量描述。随着分形维数的增大,薄膜的表面具有更加复杂的结构,表面有更多和更精细的具有纳米尺度的凹凸、皱褶和缺陷结构,具有更大的吸附和容纳气体的能力,从而提高水滴薄膜表面的接触角。其中当沉积温度为400oC的时候,具有类荷叶的表面微细结构的分维达到了2.59,而气体所占的分数为0.98。3.通过对具有特殊形貌的非晶碳薄膜进行CF4等离子体表面处理来调控其表面的润湿性能,优化处理工艺极大提高非晶碳薄膜表面的疏水性能,原来为弱疏水的表面(接触角为105o)变为超疏水表面,其接触角达到了162o。而氟化后的更多还原

【Abstract】 The wettability of solid surfaces is a very important property, which is governed by both the chemical composition and the geometrical microstructure of the surface. Special and easily controllable wettability of solid has attracted much interest because it will bring great convenience on our daily life as well as in many industrial and agricultural processes, for example, super-hydrophobic surfaces (water contact angle (CA) larger than 150o) have or will play a important role in prevention of adhesion of snow to antennas and windows, self-cleaning traffic indicators, cell motility. As an environmentally benign and economically viable optoelectronic device material, amorphous carbon (a-C) films are of interests in various applications. Combined with special wettability properties, a-C films may have greater potential applications.In present thesis, a series of a-C films were prepared by magnetron sputtering technique on substrates as Si(100) and glass, and the deposited processes were controlled to adjust the morphology of the surfaces of a-C films. To further obtain the desired wettability, surface chemistry compound of the lotus-like surfaces were plasma modified by optimized processes.The main research progresses of this thesis are shown as follow:1. The a-C films with notably different surface micro-morphology were successfully fabricated by adjusting the sputtering process. There features change from smooth to a fractal-like structure with abounding holes and complicated gofers. Interestingly the complicated surface is much like the microstructure of nature lotus leaf, which has never reported in a-C films; Via CA tests on the a-C films with different surface features indicated that the wettability of a-C films can be controlled in large scale, ranging from very hydrophilicity (40o) to super-hydrophobicity (152o) by only adjusting the surface morphology;2. The a-C films were quantitatively analyzed by Boxing Dimension method. It indicates that with the fractal dimension increase, such surface of a-C film has more complicated microstructure, more and finer nanostructured grooves, so that it is able更多还原