【作者】 郭商勇；

【导师】 刘世炳； 陈涛；

【作者基本信息】 北京工业大学 ， 光学， 2006， 硕士

【摘要】 准分子激光是以准分子气体作为激活介质而产生的激光。准分子激光属于紫外波段,波长短,适于高精度的微细加工。同时此波段光波的光子能量高,加工有机材料时以断裂化合键为主,热效应影响不大,因此适宜对高聚物进行加工。但是由于准分子激光器在激励时的放电特殊性,光束质量受到很大影响,输出的光斑较大,光斑能量分布也均匀,影响了微加工的效果。本文从分析准分子激光器的光束特点出发,对波长为248nm的准分子激光光束的能量分布做了精确分析,设计加工了适于本KrF准分子激光匀束的光波导。增加了光斑的能量均匀度,提高了光束的能量密度,微孔加工质量得到提高。分析了目前主要的几种投影物镜系统特点,从光学设计理论出发,由专业光学设计软件ZEMAX优化,设计加工了用于高精度准分子激光微孔加工的倍率为100:1的投影成像物镜。很好地消除了各种像差,能够达到10um级的微孔加工精度,提高了加工精度。本文通过分析影响微孔加工质量的因素,提出减小微孔锥度和增加微孔深宽比的掩模旋转钻孔加工方法。设计了扇形掩模,依据三轴联动加工台,设计了掩模钻孔加工系统,在此基础上研究了掩模旋转钻孔的加工参数。更多还原

【Abstract】 Excimer lasers are produced by means of activating the quasimolecule. Excimer lasers are in ultraviolet range with shot wavelength, and is suitable for the high-accuracy micro-fabrication. And lasers of this range possess of high photon energy, the primary mechanism of etching polymer is bones dissociation. So excimer lasers are suitable for processing polymer. As a characteristic of excimer laser, the beam quality of most excimer lasers are poor, for example, the beams figure are rectangular and the energy distribution are uneven, both will effect the result of micro-fabrication.This work analyses the characteristic of excimer laser at first, then an accurate energy distribution of the laser beam of wavelength 248nm is given out. Depends on the theoretic analysis, a hollow waveguide is designed. As a result, the output energy distribution is improved, Satisfies the requirement of micro-machining.Depends on the analysis of characteristics of excimer laser and the projection objective, a high multiple lens is designed, which is optimized by the professional software ZEMAX, and then used in the accurate micro-machining. The system eliminate the lens aberration perfectly, and meet the requirement of machining at the precision of several microns.This work analyses the means of micro-fabrication and the facts that effecting the result of micro-fabrication nowadays, gives out a solution to reduce the gradient and improve the depth of the micro-hole. a fan-shaped aperture mask was designed, the aperture mask cooperate with a 3-axies worktable, makes up the micro-drilling system.更多还原