【作者】 李春江；

【导师】 孙立宁；

【作者基本信息】 哈尔滨工业大学 ， 机械电子工程， 2006， 硕士

【摘要】 21世纪,微电子技术仍然是信息产业的主要技术支撑之一,光刻机是微电子器件制造业的重要工具。光刻技术一直是推动集成电路(IC)制造业向前发展的关键技术之一。广泛应用于电子封装,光电设备,探测器,MEMS设备,显示器等领域。晶圆处理系统是光刻机的重要组成子系统,其包含两个主要部分:晶圆传输系统和晶圆预对准系统。本课题来源于国家高技术研究发展计划(863计划)课题:掩膜管理和晶圆处理系统的研究。主要研究内容是研制用于12英寸晶圆预对准的系统。在总体方案和机构设计方面,分析了晶圆预对准系统的功能与流程,选定了系统的整体方案,确定了系统各单元的驱动方式和机构形式,完成了驱动和检测部分的选型,同时充分考虑机构中气动吸附部分的功能与要求,设计了预对准单元的机构。在晶圆检测算法方面,比较回转半径法、轨迹拟合法以及最小二乘圆法,选择光学线阵CCD的晶圆圆心最小二乘圆法作为系统晶圆圆心的检测方法。缺口检测先采用边缘变化率算法查找缺口范围,再通过圆弧拟合的方法求出缺口中心位置。在系统控制方面,采用了以GALIL的DMC2143为核心的运动控制单元,对压电马达平台进行PID参数调整和控制。选择ADLINK公司的ACL-8112HG数据采集卡进行气路交换控制,实现晶圆平稳交接控制。在预对准实验方面,编制控制程序,利用光学显微镜测量对心和对缺口偏差,计算系统对准重复精度,结果达到了技术要求。更多还原

【Abstract】 In the 20th century,the microelectronics is still one of the basic technical for the information industry. The lithography is an important device for the microelectronics manufacturing, it is one of the key technologies to drive the IC manufacturing forward and it is widely used in the fields such as electronic encapsulation, photo-electricity equipment, detector , MEMS equipment ,display and so on. The wafer processing system is an important subsystem of the lithography, which consists of a wafer transmission system and a wafer pre-alignment system.This work is partially supported by the High Technology Research and Development Programme of China. The main content of the research is to design and manufacture a system that is fit for 12-inch wafer pre-aligning.In the function decision and structure design, the function and the flow of the wafer pre-alignment system are analyzed,the system architecture is selected and the precision of this system is analyzed, the driving mode and the system structure are fixed, and then the motor and raster are selected. At the same time,the structure of parts is designed on consideration of the request and the function of the vacuum grasping of wafer.In the wafer-cycle fitting algorithm, comparing with Circumgyration Radius approach, Track Fitting approach, and Least Square Circle Fitting approach. In the wafer pre-alignment system, the wafer square fitting algorithm-Least Square Circle Fitting approach, based on optical linear CCD sensor, as well as the theoretical error analyze of this algorithm. In the wafer notch detecting part, edge flexion method is adopted to find the notch range, then calculating the notch center by means of arc fitting.In the system controlling, GALIL DMC2143 motion control card is selected in the system, then adjust the piezoelectricity motors PID parameters and control them. and AD-LINK ACL-8112HG data acquisition card is used in gas road exchanging controlling to make this exchange reposefullyIn the system experiments, tests are given by system control programme. Scale the error of center and notch in the system. Calculate the last precision of更多还原