【作者】 张英华；

【导师】 孙涛； 胡振江；

【作者基本信息】 哈尔滨工业大学 ， 机械制造及其自动化， 2006， 硕士

【摘要】 自原子力显微镜(AFM)问世以来,其应用领域已由原来的微观表面形貌检测或表面特征的表征扩展到纳米加工。目前,将AFM作为加工工具对不同材料表面进行纳米结构加工已成为AFM主要的应用领域之一。因此,对基于原子力显微镜的纳米刻划的相关技术进行深入研究具有重要的理论意义与实用价值。本文通过分析国内外相关微纳米加工技术的研究现状,针对基于扫描探针显微镜的微加工系统中采用原子力微探针刻划加工三维加工中亟待解决的加工深度问题,借助理论、仿真以及实验手段进行了研究。微探针的刻划加工可以分为两个过程,即压入过程和刻划过程。刻划过程目前有三种模式:恒力、恒高、深度可控。因而,本文首先通过压痕理论得到了压入深度与工作台Z向位移量的关系,并通过该理论公式分析了微探针压入过程中针尖形状、材料属性以及微悬臂的弹性对压入过程的影响。随后的压痕实验验证了由压痕理论得到的理论公式;其次,本文采用有限元的方法建立了微探针刻划的各个模式下的仿真模型,并进行了仿真分析。最后,进一步完善了基于原子力显微镜深度可控的微加工系统,并通过实验验证了仿真结果。进一步研究了恒高模式下工作台速度、进给量、不同的刻划加工方向以及恒高、恒力两种模式下针尖负载对加工深度的影响。更多还原

【Abstract】 Atomic force microscope (AFM) has been applied in the field of nano-machining since its invention even its main function falls in the inspection of surface topography and other features. In recent years, AFM-based nano-structure machining on different materials has been drawing more and more attention and is being developed as one of AFM’s main applications. So the study for the AFM-based nano-scratching technology is important to both the basic theory and improving the machining technology with AFM.Analyzing the present status of nano-structure machining, we find the main barrier to the three-dimensional nano-structure machining is the lack of the systemic thesis on machining depth.The micro-machining by micro probe can be divided into two processes: indentation and scratching. As to scratching, there are three modes: height mode, deflection mode and depth control. In this thesis, the nano-indentation theory is used to obtain the relation between depth and Z displacement of micro positioning stage. The variables which affect machining depth, such as the shape of tip, material properties and micro lever are studied. Then indentation test is used to validate previous formula. The finite element method is used to analysis all these three modes. Then the micromachining system with depth control is consummated. And simulation is verified. Beneath deflection mode, the effects of velocity, feed, machining direction and the load effects of both modes is studied by experiment.更多还原