【作者】 孙志；

【导师】 秦水介；

【作者基本信息】 贵州大学 ， 微电子学与固体电子学， 2006， 硕士

【摘要】 原子力显微镜(Atomic Force Microscope，简称AFM)的诞生为纳米技术的迅猛发展起到了推波助澜的作用，为人们在纳米尺度上研究物质的结构及其相互作用提供了有力的手段。虽然AFM在最初的发展阶段主要是以形貌测量及获得表面特性为应用特征，但是人们相信把AFM作为加工工具来对材料进行纳米加工将是其未来的主要应用领域之一。 纳米器件特别是纳米电子器件的研究，是目前纳米科技研究领域中最热门的课题之一。现今，纳米操纵技术是制备纳米原型结构、纳米器件的重要手段之一。在本论文的研究中，我们使用原子力显微镜(AFM)，在接触模式下实现了二部分工作：一、在硅片上采用局域氧化方法加工微／纳米；二、对碳纳米管束进行了各种可控操纵。 作为传统光刻工艺的替代技术之一，基于AFM的局域氧化方法在纳米加工领域具有独特的优势。该方法操作简单、成本低廉，集纳米加工与原位观测于一体，是未来纳米电子器件及电路中极具潜力的构筑手段。研究工作旨在进一步完善大气环境下的基于AFM局域氧化法的纳米加工技术，在实验和理论上进一步积累数据、经验，为下一步的实用化研究奠定基础。随着外加脉冲偏压的增大、脉冲时间的增加，加工得到的点状纳米结构的高度和半径会随之增加。建立了探针针尖一样品表面体系的简化模型，模拟计算了不同的偏压、针尖顶端与样品表面距离以及针尖曲率半径下样品表面的局域电场强度分布曲线：据此解释了不同偏压下氧化结构高度的线性变化规律，说明了氧化结构的高度和半径随着针尖顶端与样品表面距离的增大会显著减小的变化趋势，推测氧化结构的高度基本与针更多还原

【Abstract】 Atomic force microscope(AFM) has been promoting nanotechnology dramatically since it came into the world in 1986 which enable researchers to study the material surface structure and function on nanometer-scale. Although AFM was initially applied to measure the surface topography, physical and mechanical or other properties, it will be performed as a tool to explore to the nano-world.The study of micro/nanoelectrectronic devices is one of the important subjects. At present, Micro/Nano-operation is a prominent method to make Micro/Nano-structure. In this thesis, Micro/Nano-structures by field-induced oxidation and nano-manipulation separately were made by using the AFM.As one of the substitutable technology of the traditional optical lithography, the local oxidation by AFM has unique advantages in the field of nanofabrication. The AFM local oxidation is inherently a simple and low cost technique, which provides the capability of nanofabricatian and in situ observation, these merits make the technique a promising method to construct nanodevices and nanocircuit in the future. The purpose of this work is to improve the AFM focal oxidation technique and to get more cognition in both the experiments and the theories, so as to establish the basis date for the future applicable research. It is concluded that the height and the radius of nanostructures increase with the raising of the applied voltage and the pulse time. The simplified model of tip-sample system was established to simulate and calculate the distribution of the local electric field strength on the sample surface under different voltages, tip-sample distances and tip radius. Based on these calculations, the linear dependence between the applied voltages and the heights of oxide structures was reasonable. The results also indicated that the radius and heights of nanostructure decreased notably with the increase of tip-sample distances. Moreover, it could be deduced that the radius of oxide structures would keep linear relationship with the tip更多还原