含纳米硅氧化硅薄膜的制备及发光特性研究

【作者】 杨琳琳；

【导师】 郭亨群；

【作者基本信息】 华侨大学 ， 物理电子学， 2006， 硕士

【摘要】 光电子信息材料是本世纪最受关注的材料之一,光电子集成器件在信息时代有极其重要的作用。由于硅的平面集成工艺已相当成熟,所以从工艺兼容性考虑,用硅基材料作为发光器件将会是最佳的选择,而其获得应用的关键是提高发光效率。单晶硅是间接带隙材料,其带间辐射复合效率非常低,难以达到发光器件的要求,与之相比,纳米硅晶在结构、光学及光电性能方面与单晶硅不同,它在发光器件、光探测器件、光电集成以及传感器等领域有更广阔的应用前景。本文采用射频磁控溅射方法制备富硅二氧化硅薄膜,并在此基础上掺入单质铝,经高温退火,自组装生长纳米硅颗粒,并对薄膜进行了拉曼(Raman)散射、X射线衍射(XRD)、扫描电镜(SEM)、傅立叶红外吸收光谱(FTIR)和光电子能谱(XPS)的测定,对吸收光谱也进行分析。结果表明,掺铝样品引入了新的缺陷,发光强度增强。本论文主要测定薄膜的光致发光和电致发光特性。在光致发光测定中,我们得到了位于360nm和675nm的发光峰,并讨论他们的激发谱和发光中心。在电致发光测量中,我们采用ITO作为衬底材料,目前在国内用ITO作为衬底材料的并不多,虽然可以透光,但是不能提供电致发光所需的空穴,测量时,在黑暗的环境下用肉眼即能观察到发光,可重复得到,并对其发光机理进行讨论。更多还原

【Abstract】 The material of optoelectronic information is one of the extremely greatest concerns of the material. Optoelectronic integrated devices take the most important effect. Silicon horizontal integration processes are very mature. Considering the compatibility of the technics, taking silicon material as the luminescence devices will be the perfect selection. But the most important things are how to improve the efficiency of the luminescence. Bulk silicon has an indirect energy bandage and is therefore highly inefficient as a light source. It is hard to get the goal of luminescence devices. Nanocrystalline silion (nc-Si) have many difference from bulk silicon, such as structure, the capability of optics and photoelectricity. It shows high potential on light-emitting devices, photodetector, optoelectronic devices and sensor.Si-rich silica was deposited by RF magnetron sputtering and the film dopped with aluminium is deposited too. Flowing the annealing in the stove, we get the auto-assemble the nc-Si particles. The film was studied by Raman scattering, X-ray diffraction, SEM, FTIR and XPS. We analyze the spectrum of absorption.The emphasis of the article is to study the spectrum of photoluminescence and electroluminescence. The photoluminescence spectra were found to have the peak at 360nm and 675nm. We discuss the exciting spectrum and luminescence center separately. We take ITO as the underlay material. Few people take this underlay material at present. Although it is transparent, it can’t provide the cavity. We can observe the light from the ITO at dark and it can be observed repetitious. We discuss its luminescence plain.更多还原