【作者】 苏艳丽；

【导师】 何京良；

【作者基本信息】 山东师范大学 ， 光学， 2006， 硕士

【摘要】 激光二极管泵浦的全固态激光器(Diode Pumped Solid State Lasers, DPSSL)具有效率高、稳定性好、光束质量好、结构紧凑、寿命长等优点,是多年来的研究热点之一。紫外、深紫外激光器在微精细材料加工、光刻、光印刷、高分辨光谱学、微电子学、光生物学、超高密度光驱、紫外固化、医疗和科学研究等领域有广泛的应用前景。本论文围绕全固态213nm深紫外激光器进行了理论和实验研究,论文主要内容概括为:1.介绍了全固态紫外、深紫外激光的应用,总结了当前全固态紫外、深紫外激光器研究的国内外动态。2.介绍了非线性晶体中的相位匹配技术;总结了紫外倍频晶体的基本特性。3.从高斯光束矩阵变换角度出发,对谐振腔进行了简单的设计;在此基础上结合理论和工作要求,优化腔结构。介绍了声光调Q原理,比较了几种常用的掺钕激光晶体的特性;,探讨了获得最佳准连续1064nm激光的方式。4.分别选用腔内、腔外倍频的方案实现532nm绿光激光输出。结合理论分析采用了KTP/BBO晶体实现腔外1064nm四倍频产生266nm紫外激光。在注入泵浦功率10.3W、重复频率20kHz时,获得59mW的266nm紫外激光输出,532nm→266nm光-光转换效率为9%,脉冲宽度8ns、峰值功率370W。5.比较了两种产生五倍频激光的技术方案,根据五倍频的转换效率公式,推出了当晶体长度为最优化长度时对应的五倍频转换效率;为使激光器的输出能量得到充分利用,分析了产生紫外激光时各光波偏振的匹配情况,采用1064nm和266nm和频的方案实现了213nm深紫外激光输出。更多还原

【Abstract】 Diode-pumped all-solid-state lasers (DPSSL) have become a central of focus inthe field of lasers due to their many advantages, such as high efficiency, highstability, good quality of light beam, compactness, long lifetime and etc.All-solid-state deep ultraviolet lasers are widely used in the field of precise materialsmaking, optical chisel, optical printing, spectroscopic analysis, microelectronics,medical treatment and scientific research in general. This dissertation presentsresults of theoretical and experimental researches on lasers based on all-solid-state213nm deep ultraviolet laser. The contents can be outlined as follows:1. The advantages and applies of diode-pumped solid-state ultraviolet lasers areintroduced. The main approaches and new results of all-solid-state ultravioletlasers with diode-pumped at present are summarized.2. Introducing the theory of nonlinear frequency doubling, sum-frequency and thephase-matching technology. Analyzing the characters of every kind of nonlinearcrystal, their advantages and shortness are presented.3. The Q-switched technology and principle of acoustic-optical Q-switched aresummarized. Analyzing the characters of some kind of laser crystals, theiradvantages and shortness are presented. The best work way of 1064nm laser isinvestigated by theory analyzing and need of our experiments.4. The continuous waves of 532nm is obtained by inter-cavity frequency doublingand extra-cavity frequency doubling separately. Based on the analysis of theory,the ultraviolet output at 266nm is achieved by using KTP/BBO crystal. Whenthe incident pumping power was 10.3W, we obtained 59mW 266nm ultravioletoutput and Green-UV energy conversion as great as 9% at 20 kHz repetition ratewith pulse duration of 8ns and peak power of 370W.5. Generation of a fifth harmonic is investigated theoretically. With the help ofanalytical numerical investigations the optimized conditions for maximumconversion into the fifth harmonic are found. Then, we obtained deep ultravioletoutput at 213nm.更多还原