【作者】 陈东升；

【导师】 傅惠南；

【作者基本信息】 广东工业大学 ， 机械制造及其自动化， 2006， 硕士

【摘要】 金刚石表面具有优异的物理、化学、机械性能,被广泛应用于科技产业及工程技术领域,这些应用经常要求高精度地加工制作金刚石,使其表面平整、光滑以及具有一定的尺寸、表面形状精度。作为工具,单晶金刚石是目前理想的刀具材料,被广泛应用于超精密加工领域,金刚石刀刃制作的锋利程度、精度、质量直接影响超精密加工技术水平,是人们十分关注的领域。但金刚石具有最高的硬度,耐磨、易脆、耐蚀等特异性能,同时也使得超精密金刚石刀具的制作极其困难,是产业应用的关键技术,其迫切需要解决而得到广泛的研究。目前尽管人们研究了各种金刚石加工方法,但其中机械研磨由于其技术成熟、加工稳定、易于控制、成本较低等特点,仍然是主要的加工技术手段而被广泛采用。 精密、高质量金刚石刀具制作,受加工条件、环境、设备和操作技术的制约,具有技术挑战性。其中最重要和最基本的问题之一,是改善加工条件、研磨技术装备,尤其针对目前我国技术发展状况,即如何提高研磨装置的运行精度和平稳性成为能否加工出高质量金刚石刀具的关键问题。 本文讨论和分析影响研磨装置运行精度和平稳性的主要因素,在此基础上提出基于精密流体动力轴承、采用无位置传感器无刷直流电机技术设计高速运转平稳的小型精密主轴系统;以及采用音圈电机、伺服位置信息磁头以及伺服盘片组成闭环控制装置,设计和制作精密进给系统;组成小型精密研磨装置以实现精密、平稳的金刚石超精密研磨。包括以下各部分的开发研究: 设计并制作了小型、精密的主轴系统,它采用无位置传感器无刷直流电机技术结合流体动力轴承技术,使得电机运行平稳、精度高。尽管电机结构比较简单,但是电机控制比较复杂。针对这个问题,本文采用专用控制芯片ML4426作为主轴系统控制核心,设计了外围电路。同时,采用PWM控制实现了主轴系统的电流和速度双闭环控制。 设计进给运动系统实现金刚石研磨的轨迹控制。它以音圈电机、伺服位置信息磁头及伺服盘片组成闭环控制系统作为的进给运动系统的核心,能够使得进给运动系统运行平稳,精度高。对音圈电机的机械结构进行改造,使其能够驱动金更多还原

【Abstract】 Diamond has some excellent performance in physics、 chemistry、 mechanism, so it is used to science and engineering field where need diamond cutting tool with smooth surface and precise size as well as shape. As cutting tools, diamond is most ideal material, and it has been used in precise process field. How to make diamond cutting tool with sharp knife-edge, high precision and quality, it direct influence the level of ultra precise process technology and become focus of research. But diamond is rigid, wearable, friable, resist erode, so it is very hard to make ultra precise diamond cutting tool. Making diamond cutting tool has become key technology and need to research emergently. There are many methods of making cutting tool now, but mechanical lapped method is mostly used to make cutting tool, because of mature technology, process stabilization, easy control and low cost.Making ultra precise and high quality diamond cutting tool is a challenge of technology. There are some factors which influence making diamond cutting tool, like process condition, environment, equipment and operate skill. But most important and base problem is improving process condition and lapped equipment in our country, so how to improve move’s precision and stabilization of lapped machine is the key problem.In this paper, the primary factors which influence move’s precision and stabilization of lapped machine is discussed and analyzed. A precise, minitype, high speed spindle system has been designed, by using sensorless brushless DC spindle motors which is built with fluid dynamic bearings;The Servo feed systems based on closed loop feedback device which is made up of voice coil motor, servo head and servo disk is designed and done. In order to lap diamond in precision and stabilization, the minitype precise lapped machine includes these researches:The minitype and precise spindle system has been design and done. It adopts fluid dynamic bearings technology and sensorless BLDC motor technology so that spindle system rotates stably and precisely. Though the motor figure is simple, thecontrol system is very complicated. In order to solve this problem, IC ML4426 is adopted as core of spindle system, and the peripheral circuit has been design. PWM control is adopted to achieve current and speed closed loop control.The servo feed system is designed to achieve track control. The core of servo feed system is make up of voice coil motor, servo head, servo disk, it can make sure the system move stably and precisely. In order to achieve servo control of servo feed system, servo information detect circuit and control software is designed, and is used to pick-up servo information form servo disk. The track control software is designed by C programme.Precise lapped disk is done, it utilize high precise plane geometry disk as base disk and coat diamond-like carbon film. Precise lapped disk of this paper can improve the problem of lapped powder which is pockety and dissimilarly high.Air filter is also designed. It is used to protect lapped machine and improve lapped environment.Finial, assembled lapped machine is used to experiment of making diamond tool. Experiment include: 1. Lapped surface of diamond, the objective of this experiment is testing the lapped machine’s stability by detecting quality of diamond cutting tool surface. Tests by the AFM show that the surfaces of diamond edge’s Ra is 6.725nm and whole diamond average Ra is 3.25nm. The result indicated the lapped machine is precise and steady. 2. Lapped knife-edge of diamond cutting tool. The objective of this experiment is also test the lapped machine’s stability by compare lapped knife-edge of diamond cutting tool by lapped machine which is design in this paper and general lapped machine. The test result indicated our lapped machine can still grind straight knife-edge when angle is less 90°. So the result also indicated the lapped machine precise and steady.更多还原