【作者】 张乐；

【导师】 何广平；

【作者基本信息】 北方工业大学 ， 机械电子工程， 2006， 硕士

【摘要】 微机电系统(Microelectromechanical Systems,简称 MEMS)是一门新兴的综合性科学,正日益受到广泛重视,并在精密加工、国防、航空航天等领域广泛应用。MEMS材料的机械力学性能对于其功能实现、性能提高等方面有很大的影响。研究微材料机械力学性能的测试方法是解决MEMS设计、制造、质量控制与评价的关键环节。为了能正确测得微机械力学性能,必需研制一种能适应MEMS材料的多种力学性能的测试仪器。测控系统是微材料力学性能测试仪系统重要的组成部分,为满足系统对微弱信号采集与处理的要求,本文设计了一种具有高精度、高可靠性的通用测控系统硬、软件结构。 基于全柔性机构的MEMS材料力学性能测试仪主要由精密定位子系统(包括机械本体和驱动电源)、试件夹持子系统、载荷/位移测量子系统和测控子系统四部分组成。测控系统是MEMS材料力学性能测试仪系统重要的组成部分。 本文所设计的测控子系统以DSP为的中央处理器,实现信号处理和压电陶瓷的伺服控制,将高分辨率的A/D和D/A转换器应用于数据采集和模拟输出模块,并通过高速的PCI总线方式与上位机进行通讯。本文针对测控子系统展开了如下研究: (1) 简要介绍了MEMS材料力学性能测试的现状和重要性。 (2) 对MEMS材料力学性能测试仪进行了整体性介绍,并着重说明测控系统的功能与特点,提出了测控系统的设计方案。 (3) 根据测控系统硬件结构,分析了各个组成模块的设计方法与设计要点,包括DSP最小系统的设计、数据采集模块设计、数据输出模块设计、可编程逻辑模块设计以及计算机接口模块设计。在硬件设计的基础上,完成了初步的系统软件设计。 (4) 综合了测控系统与精密定位子系统,完成了系统功能验证和部分性能测试。实验结果证明:本测控系统的设计能够满足测试要求,方案正确可行。 本文研究的测控系统对MEMS材料力学性能测试仪的进一步研制具有指导和借鉴意义,为下一步的研究打下坚实的基础。更多还原

【Abstract】 MEMS(Microelectromechanical Systems), a kind of emerging technique involved in multi subjects, has being paid attention to and widely used in precise machining, national defense, aerospace field and so on. The mechanical properties of MEMS materials play great role in determining its function realization, performance enhancement and so on. Studying the test method for mechanical properties of MEMS materials is the key related to solve the MEMS design, manufacturing, quality control and appraisal. A kind of test instrument, suitable for measurement of MEMS materials’ mechanical properties, is badly needed. The measurement and control (M&C) system is an important component of test instrument. To meet the needs of system for weak signal gathering and processing, a high presion and reliable hardware and software architecture of general M&C system is designed. The test instrument for mechanical properties of MEMS materials based on FCM (Fully Compliant Mechanism) consists of four parts, namely precision positioning subsystem including mechanical body and PZT driving power, specimen clamping subsystem, load and displacement measuring subsystem and measurement and controlling subsystem. In the M&C subsystem. DSP is used as its CPU to realize signal processing and servo control of PZT, 24 bit AD and 16 bit DA are adopted for data gathering and analog output, and the PCI bus is employed to communicates with computer . In this thesis, the following studies on precision positioning subsystem are completed:First, the importance and current situation of test instrument for mechanical properties of MEMS materials is introduced briefly.Second, the integrity introduction to test instrument for mechanical properties of MEMS materials is carried on, the function and characteristic of M&C system is also emphasized, and the system design scheme is proposed.Third, according to the M&C system hardware architecture, the key design and method of each composition module is proposed, including DSP smallest system design, data gathering module design, data output module design, programmable logical module design as well as computer interface module design. Based on hardware design, the preliminary system software design has been completed in this paper.Finally, the M&C subsystem and the precise localization subsystem are integrated into the system.System function and partial performance test are completed. The test result proves that the design of this M&C system can meet the need of testing, the scheme is accurate and feasible.The M&C system studied in this paper has provided guidance and reference significance for advanced development of MEMS materials mechanics performance test instrument, and built firm foundation for the future research.更多还原