【作者】 卫兵；

【导师】 胡鹏浩；

【作者基本信息】 合肥工业大学 ， 精密仪器及机械， 2006， 硕士

【摘要】 三维测量系统广泛应用于现代工业,特别是在精密制造技术中,三坐标测量机占有主导作用。随着测量精度的不断提高,特别是纳米级精度的出现,传统三坐标测量机已经不能满足测量要求,因此纳米三坐标测量机应运而生。为了提高纳米三坐标测量机的测量精度,可以通过很多措施,如提高结构精度、驱动技术、测头技术等。 本文主要介绍了一种新型的纳米三坐标测量机主体结构设计与分析。在分析现有纳米三坐标测量机结构的基础上,提出了一种新型的四面对称式桥架结构。文章对新型主体结构进行了静、动态分析,其目的是为分析和评定纳米三坐标测量机的静、动态精度做准备。通过建立结构变形的数学模型以及振动模型,利用ANSYS对桥架结构进行了分析,并与龙门式和拱形式结构加以对比,从而证明了该结构在保证静、动态精度上的优越性,并完成了该结构的优化设计。 同时本文对Z轴驱动系统进行了初步的研究。通过分析选择具体的驱动方案,包括驱动方式的选择、驱动电机的选择、数据采集卡的选择等。主要利用VB编程,有效的控制了数据采集卡的D/A和开关量,从而控制了AB2伺服放大器的工作电压和工作模式,实现了对Z轴驱动的实时可编程控制。更多还原

【Abstract】 Many types of three dimensional mechanism (3D-mechanism) are used in modern industry. Specially, in precision manufacture technology, coordinate measuring machines (CMMs) play the key role. With the improvement of measurement accuracy, especially appearance of the nanometer-level accuracy, conventional coordinate measuring machine can’t meet the demand of 3D measurements, so Nano-CMM appears in the world. In order to improve the measurement precision of Nano-CMM, much technology should be used, for example, precision of structure, driving technology, probe technology and so on.This paper presents a novel structure design of Nano-CMM main body. The new structure named symmetrical-bridge is developed based on the analysis of conventional Nano-CMMs. The static analysis and dynamic analysis of the new structure will be introduced in this paper, and the aim is to assess and analyze static & dynamic accuracy of structure. Compared with rectangular-bridge and arch-bridge, this new structure provides great static rigidity and dynamic rigidity based on theory analysis and ANSYS software analysis. Therefore, the superiority of this new structure is verified and the optimum design is finished.The research on driving system of Z-axis will be introduced in this paper. Though analysis the driving system will be developed, included selecting of driving mode, driving motor, data acquisition card and so on. The D/A and I/O of data acquisition card will be controlled through VB software, so programmed real-time control of Z-axis should be achieved efficiently.更多还原