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动态测量误差分解及溯源研究

Research on Error Separating and Tracing of Dynamic Measurement

【作者】 李晓惠;

【导师】 陈晓怀;

【作者基本信息】 合肥工业大学 , 测试计量技术及仪器, 2006, 硕士

【摘要】 误差分解和溯源就是将动态系统最后输出的总误差分解为各单项误差成分,并进一步追溯到动态系统内部产生该项误差的母体组成单元或组成件,并进一步分析其误差特性。这是误差理论发展所面临的重要问题之一。 动态测量误差信号是包含多分量的非平稳信号,成分的复杂性决定了对它的分析和处理需要结合多种信号处理方法。本文分析了各种信号处理方法的原理及其在非平稳信号处理中的应用,在此基础上总结了动态测量综合误差分解的基本方法和一般步骤,并通过计算机仿真说明了此方法的实用性。将此方法应用于三坐标测量机的误差分解也取得了较好的效果。 本文设计了一套光栅测长仪动态误差分离的实验系统,以现有的光栅测长仪为研究对象,高精度双频激光干涉仪作为校准系统。利用A-quad-B脉冲信号触发激光干涉仪进行同步动态数据采集,由激光干涉仪软件(根据IS0230-2标准)来获取和显示位置误差数据,并同步绘出非常真实详细的动态误差图。最后将实验所得的动态误差进行分解和溯源,基本掌握了光栅测长仪动态测量误差的组成和特性。

【Abstract】 Error decomposition and traction is to decompose the measuring errors of the dynamic systems into the component errors and trace to their sources, i.e. the units within the measurement system. This is one of the important issues in development of error theory.Error of dynamic measurement is a nonstationary signal comprising several components. Because of the complexity of its components, many methods of signal processing are needed to analyze the dynamic error. This paper analyzes the theory of several methods of signal processing and the application in nonstationary signal processing. With this understanding, the method and process of dynamic error decomposition is introduced. A simple simulation system shows the practicability of this method. Also, the good effect is gained applying this method to Coordinate Measuring Machine.This paper designs a acquisition system of dynamic errors for grating-measurer. The Hewlett Packard 5529A laser interferometer performs dynamic errors calibration. Such method uses the A-quad-B pulses as the position trigger signals. The software package of the HP laser interferometer permits the data acquisition and presentation of the dynamic errors in accordance with ISO-232 standard, and provides a realistic and detailed picture of the errors synchronously. At last, the dynamic error is decomposed and traced. The characteristic and composition are mastered basically.

  • 【分类号】TG806
  • 【被引频次】23
  • 【下载频次】653
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