【作者】 韩尔立；

【导师】 陈强； 葛袁静；

【作者基本信息】 北京印刷学院 ， 材料物理与化学， 2006， 硕士

【摘要】 食品保质保鲜要求包装材料具有优良的阻隔性能,即阻止水蒸气和气体渗透的性能。镀 SiOx 阻隔材料具有足以与镀铝材料相媲美的阻隔性能,同时又具有可见光透过和微波直接加热的特性,因而成为包装材料发展的一个热点方向。对PET、BOPP、PE 三种常用包装薄膜基材进行实验比较,选择 PET 作为 SiOx 阻隔膜沉积基材。采用电子束蒸镀和磁控溅射两种沉积工艺在不同工艺参数下制备SiOx 阻隔薄膜。所沉积薄膜用表面轮廓仪进行膜厚测试,并进行了薄膜均匀性测试。利用 FTIR,SEM,XPS ,XRD 分别对沉积膜的结构,表面形貌,元素组成等进行了表征。并考察了离子源辅助对磁控溅射沉积薄膜的影响。研究结果如下:1. 薄膜均匀性测试显示,磁控溅射均匀性较好,在片内均匀性、片间均匀性和炉间均匀性上均优于电子束蒸镀法。2.薄膜表面形貌分析显示,电子束蒸镀沉积的 SiOx颗粒粗大,表面缺陷较多,而磁控溅射沉积 SiOx薄膜均匀致密,但仍有微裂纹,经离子源辅助后裂纹大大减少,甚至消失。3.XRD 测试未显示衍射峰,表明所沉积薄膜为非晶态,可能的薄膜生长方式为岛状生长,形成不连续的无定性非晶态结构。4.用电子束蒸镀和磁控溅射方法制备 SiOx薄膜均能够提高基材的阻隔性。5.离子源能够活化沉积粒子,减少薄膜缺陷,提高薄膜附着力。更多还原

【Abstract】 Food Packaging material requires an excellent barrier ability to humidity andoxygen. SiOx barrier coating deposited on high polymer substrate can compare beautywith aluminum foil in the barrier quality, even more SiOx barrier coating is obviouslyallowing microwave permeating directly and it also provide a chance for merchant tovision their production in shelf life. So, SiOx coating as barrier packaging material isbecoming a high light. PET was chosed as Substrate, after comparing with BOPP andPE . SiOx coating was deposited on the substrate of PET by electronic beamevaporation and magnetic sputtering methods, varying technical parameter. Thedeposition film was measured by Profilmeter, FTIR, SEM and XPS. Meanwhile, theeffect of ion assisted on deposition process was also researched. The results wereconcluded as follows:1. SiOx coating deposited by Magnetic sputtering is more uniform than that ofelectronic beam evaporation.2. SEM indicate that SiOx film deposited by electronic beam evaporation is morefluctuant and disfigurement than that of magnetic sputtering3. XRD measurement states no diffraction peak, which means the film depositedas amorphism4. SiOx coating deposited by the both methods had a great progress in barrierquality.5.film quality can be improved by ion assisted更多还原