【作者】 王浩林；

【导师】 李蓓智；

【作者基本信息】 东华大学 ， 机械制造及自动化， 2006， 硕士

【摘要】 在精密磨削玻璃、陶瓷、半导体等脆硬材料时,砂轮切深进给量小于0.1μm,使磨屑呈现出类以切削塑性材料时的卷曲状,并且工件表面没有加工裂纹,加工精度高。然而,传统磨床由于缺少关键技术的有力支持,进给系统不可避免地存在爬行现象,位移分辨率较低,且系统的响应速度低等缺点。 本文以某省(市)级科技攻关项目“面向精密加工压电驱动微进给系统设计与研究”为背景,在分析精密磨削、精密磨床和微进给控制技术的基础上,从工程实际应用出发,研制了一种面向精密磨削的压电陶瓷驱动微进给新型控制系统,该系统是一个集驱动、检测和精度补偿为一体的闭环控制系统。 本文在以下几个方面进行了较为深入研究: 1.通过对比各种微进给工作台特性和压电陶瓷驱动器控制方法,对微进给系统及其在磨床上的应用进行了方案论证和总体设计。微进给工作台采用压电陶瓷驱动、柔性铰链作为精密位移机构。精密磨床采用二级进给机构,即利用磨床的进给系统作为第一级进给机构实现粗磨、半精磨;用刚度、分辨率和响应速度较高的微进给工作台作为第二级进给机构实现微量进给,完成工件的精密磨削。 2.将微进给工作台等效为单自由度弹簧阻尼系统,建立了该工作台动力学模型。为了消除微进给工作台非线性工作特性下的各种干扰因素的影响,特建立了系统的开环控制和闭环控制两种模型,并在更多还原

【Abstract】 Precision manufacturing is a manufacturing method that has a less than 0.1μrn accuracy and a lower than Ra0.025μm roughness. When glass, ceramic and semiconductor are grinded, the cut depth is not more than 0.1μm. There is no craps on the surface of the parts, and the scraps are curl like plastic. But the feed system of the traditional grinding machine has creep unavoidably, low resolution and response speed.This article based on a study of ’Micro-feed system used for precision grinding and its application’, presents a close-loop control system used for piezo-driven micro-feed platform, which is an integration of drive, inspect and compensation.Some research has been done including:1. The design of a micro-feed system. Through a compare of all kinds of micro-feed system and piezo-driven methods, the pattern of micro-feed system is designed. The system uses piezo stack as the actuator and flexure hinges as guiding unit The precision grinding machine has a duel feed stage that including rough stage and precision stage. The rough stage achieves the rough grinding and semi-precision grinding, and the precision stage achieves micro-feed with high stiffness, resolution and quick response.2. The dynamic model of the micro-feed system is built. To avoid thenon-linear of the platform’s output and other factor during grinding, an open-loop and a close-loop control system are designed and simulated with Matlab. The result proves that the micro-feed system has a high accuracy and a quick response under the open-loop control system.3. A close-loop control system is designed based on the non-linear model of the piezo stack. The system uses MCS-51 series single chip AT89C51 as central processor, an inductance sensor as feed back. The system is a modularization design which has dive module and inspect module. The drive module includes power supplier and D/A. The non-linear model of piezo stack and the control program are presented.4. The data acquisition system is designed. The static and dynamic experiments are made to test the properties of the micro-feed system. The results prove that the control system of piezo-driven system has a 27um stroke, ±0.04um accuracy and a 195N/um stiflhess with a friendly interface, low cost, small volume and agile applicationWANG Haolin (Mechanical Manufacturing & Automation)Supervised by Prof. LI Beizhi更多还原