【作者】 刘宁；

【导师】 张国雄；

【作者基本信息】 天津大学 ， 测试计量技术及仪器， 2005， 硕士

【摘要】 在科研和生产各个领域,随着高精度的尺寸测量以及应用在柔性定位跟踪系统等各种的需要,激光干涉仪因为其突出的性能和特点,已经在越来越多的领域广泛使用。本文在臧艳芬、刘海宁博士工作的基础上,对新型的双光路激光干涉测长仪进行了研究,着力于使其产品化,更便于实际应用。论文的主要工作包括:1.论述了这种新型激光干涉测长仪的工作原理及特点。在测量中测头能从工件的一端移到另一端而不丢光;光路上能补偿因测头系统发生倾斜而造成的阿贝误差。2.设计制作了所有需要的光学器件,并研究了这些光学器件因加工及装配上的误差给测量结果带来的影响,以及调试上可能出现的困难。3.设计加工出一整套安装光学器件的机械装置,它具有结构简单可靠,对需调整的光学器件各有其独立的微调结构,能够方便地对光学器件的三个角自由度做出相应的调整。当调试完成后,可组装为一体,以后测量时只需整体调整就可使用,不必对其内部的光学器件做单独的调整。整个机械结构尺寸小,重量轻。触发测头采用接触式触发,通过平行片簧悬吊测杆、测球及测量镜,使用电涡流位移传感器拾取测头触发信号。4.为使这种激光干涉测长仪能方便地应用于三坐标机,设计一套能实际使用的触发电路,拾取当三坐标机运行时,测头接触工件时发出的信号,触发激光干涉仪读取触发时的信号并记录数据,并且此触发信号还能使三坐标机停机,以避免三坐标机的继续运行而损坏测头或工件。确定了电涡流位移传感器的发讯值,实现微测量接触力发讯,以减小测球及测杆在力的作用下接触变形和弯曲变形。5.在三坐标测量机上完成了激光干涉测长仪的性能实验。在三坐标测量机运行中,将激光干涉测长仪的测量数据与三坐标示值机进行比对,并通过测量8mm石英标准具,进行了比对,分析了测量的不确定度。更多还原

【Abstract】 In scientific research and industrial production, along with the need of high accuratedimension measurement and precise positioning and tracking, laser interferometer is widely usedin more and more domains because of its prominent performance and characteristics.This thesis studies a new double path laser interferometric length-measuring instrumentbased on the work of Dr. Zang Yanfen and Liu Haining. It aims at its product development andmaking it more convenient in practical applications.The research work covered by this thesis includes:1. The principle and characteristics of the interferometric length-measuring instrument areanalyzed. In measurement, the probe can move from one end of the measurand to another endwithout losing count. Compensation for the Abbe error caused by pitch of the probe isintroduced in the optical diagram.2. All optical components have been designed and manufactured. The difficulties in systemadjustment and their influences on measured results are discussed and studied.3. The mechanism for installing all the optical components is designed and manufactured. Thismechanism has a reliable and concise structure. In this structure, each optical component thatmust be adjusted has its independent trimming system. It facilitates three-degree freedomangle adjustment of the corresponding optical component. After all the components arealigned, they are assembled together as a body. Only whole adjustment is needed in the laterusage of the probe, and no individual adjustment for each internal optical component isneeded. The entire mechanism is small and light. The probe triggers when it comes intocontact with the piece. The measuring stylus, ball tip and measuring mirror are suspended byparallel springs. An Eddy current sensor is used to trigger the signal.4. The application of the laser interferometric length-measuring instrument in 3D coordinatemeasuring machines is studied. A special triggering circuit is designed and implemented todetect the contact between the probe and the work piece while the 3D coordinate measuringmachine is running. Once the contact signal is detected, this circuit samples the reading of thelaser interferometer to record the displacement and stops the 3D coordinate measuringmachine to avoid damages of probe or workpiece by collision.By using the Eddy current sensor minimum contact forces in measurement is realized, and inturn the deformations of measuring ball and measuring stylus are minimized.5. Some comparison experiments on a 3D coordinate measuring machine were conducted. Thelaser interferometric length-measuring instrument was mounted on a 3D coordinate measuringmachine and a reference 8-mm quartz block was measured. The uncertainty of measurementwas tested.6. The possible errors in measurement are analyzed qualitatively. Some suggestions forimproving the accuracy of the probe are given.更多还原