【作者】 董淑梅；

【导师】 李言； 王涛；

【作者基本信息】 西安理工大学 ， 机械工程， 2005， 硕士

【摘要】 本课题的主要研究对象是激光晶体生长设备中的核心技术—自动直径控制（ADC）技术。自动直径控制技术是Czochralski法（简称:Cz法）晶体生长设备的一项关键技术,随着晶体生长向优质大尺寸方向发展以及坩埚内投料量的加大,对晶体直径测量和精度控制的要求也愈来愈高,研究开发技术先进、精度高、性能稳定可靠的自动直径控制（ADC）系统,对于大幅提升国产晶体生长设备的自动化程度和产品质量是非常必要的。 本课题依据激光晶体生长的工艺要求,在多年研究工作的基础上开发了一种性能先进的上称重法自动直径控制系统。分析了上称重法自动直径控制技术的工作原理,从理论上给出了控制模型,在此基础上,研究了实现上称重法自动直径控制的机械结构、真空密封、电气控制、系统标定等关键技术,实现了晶体瞬时生长速率精确而平稳的自动控制,成功生长出φ2—3英寸Nd∶YAG晶体及LiNbO₃晶体,解决了激光晶体生长中自动直径控制的难题。通过对该系统的静态试验及用户的实际生产状况来看,该上称重法自动直径控制系统能够大大减少晶体在直径方向上的波动,提高了晶体的内在品质及晶体生长设备的自动化水平,减少了人为因素对晶体生长的影响,降低了从事晶体生长人员的劳动强度,对晶体生长实现规模化、产业化具有重要意义。更多还原

【Abstract】 This subject is based on the Automatic Diameter Control （ADC） technique for laser crystal growth equipment. ADC is a key technique for the Czochralski （Cz） method crystal growth equipment. As the crystal diameter and charge become larger and larger, it is necessary and urgent to research and develop the ADC system with advanced and accurate and stable technique, to improve the crystal quality and national crystal growth equipment’s automatic control degree greatly.Based on years of studying experience and the laser crystal growth demand, An advanced Up Weighing method ADC system has been developed; the principle of the Up Weighing method has been analyzed from theory and the control model also has been set up; In addition, During the designing process, the mechanical part, vacuum sealing and electric control, etc, all of these key parts had been studied by optimizing every small and important unit; After finishing system’s adjustment, static measurement and running actually, the accurate and stable crystal growing instantaneous rate for automatic diameter control during the crystal growing process was realized. Φ2-3 inch crystal such as Nd :YAG and LiNbO₃ had been produced successfully. This result solves the problem for laser crystal growthequipment that it is difficult to control crystal diameter. From the customer’s feedback, this system reduces the undulation in crystal diameter direction, reduces the influence of workman, reduces the labor and improves the crystal quality. As a whole, it would encourage crystal industry to develop more quickly.更多还原