【作者】 秦坤；

【导师】 王雪文；

【作者基本信息】 西北大学 ， 电路与系统， 2005， 硕士

【摘要】 场发射显示器件(FED)综合了CRT和平板显示器件的优点是当前研究的一大热点。各种类型的金刚石材料具有优良的物理化学性能,将其作为场发射阴极材料已成为目前FED开发的重要方向。 本文对纳米金刚石涂层场发射阴极的制备工艺进行了研究。对纳米金刚石粉的分散液配方进行了改进,优化出了最佳的分散配方。对纳米金刚石粉的涂覆方法作出了改进,提高了金刚石涂层的均匀性。对真空退火系统中的热丝结构进行了改进,改善了热退火中热场的均匀性。采用了射频等离子体技术对样品表面进行氢化处理,极大的提高了氢处理的效果和效率。 本文重点探索了TiC界面层厚度和金刚石涂层厚度对场发射性能的影响,分析比较了不同热处理温度和不同涂层厚度样品的场发射性能,确定出较为理想的退火温度与金刚石涂层厚度的参数组合。研究了电子在场发射阴极中的输运机理,通过在金刚石涂层中掺入钛纳米粉引入了TiC导电沟道,提高了样品的场发射性能。优化了射频氢等离子体处理中的重要参数,确定出了最佳的处理时间、衬底温度、辉光压强,并对氢等离子体与纳米金刚石涂层的作用机理进行了较为深入的分析。通过拍摄大量的发光照片,对影响发光均匀性的主要原因进行了初步的分析。 本文采用XRD、SEM、EDS、AFM、Raman等测试分析手段对样品进行了检测分析。测试结果表面,最佳工艺下样品的阈值电压(电流密度为2μA/cm~2)为1.9V/μm,在18V/μm场强下的最大发射电流密度为61μA/cm~2。更多还原

【Abstract】 FED devices with all the advantages of CRT and flat panel displayers have become a hot study issue nowadays .Diamond materials have very good physical and chemical abilities . Using diamond to work as cathode material is an important direction in the development of novel FED devices.The preparation technics of the nanocrystalline-diamond powder coating FED cathode is researched. The diamond dispersant formation is improved . The uniformity of the diamond coating becomes better by improving the coating method . The heat uniformity for annealing is also improved . RF plasma techniques is used to improve the effects and efficiency of hydrogen plasma treatment.The influences of thicknesses of the TiC interface layer and diamond coating on the field emission properties are primarily explored and the ideal combination of annealing temperature and coating thickness is decided. The mechanism of electron’s transportation in the diamond coating is researched . The emission capability is improved by mixing Ti nano-particles into the diamond coating. The plasma treatment time , pressure and the temperature of substrate are optimized and the active mechanism between hydrogen plasma and diamond coating is researched . A lot of emission photos are taken and the main reasons influencing the uniformity of lighting are analysed.XRD、 SEM、 EDS、 AFM、 Raman Spectra are used to test and analyse the prepared FED cathodes . Using the best preparation technics , we achieve a best threshold voltage of 1.9 V/μ m and the biggest current density of 61 u A/cm2 under an electric field of 18 V/μm.更多还原