【作者】 叶坚；

【导师】 乐孜纯；

【作者基本信息】 浙江工业大学 ， 通信与信息系统， 2005， 硕士

【摘要】 X射线聚焦组合透镜是一种利用折射效应对X射线辐射聚焦的新型元件。该器件具有不需要折转光路、高温稳定性好且易冷却、结构简单紧凑等特点。随着对X射线组合透镜研制的深入和技术的改进,X射线组合透镜将在芯片无损快速探测、半导体工业中化学成分、晶体质量及机械应力的探测和分析中发挥重要作用。 利用原子散射因子数据,对常用X射线组合透镜材料在高能X射线波段的光学常数进行了计算,并分析了组合透镜设计中的材料选择问题。针对X射线波段的特性,分析了X射线组合透镜的折射和吸收效应。将X射线组合透镜聚焦装置与夫琅和费衍射装置作了比较,认为X射线组合透镜聚焦装置可被当作一种夫琅和费衍射装置。利用傅立叶变换与夫琅和费衍射的关系,采用傅立叶频谱分析方法得出了X射线组合透镜的焦面强度分布函数。并与常用的基于菲涅耳-基尔霍夫衍射理论得出的结果相比较,以此验证了傅立叶频谱分析方法的可行性。 根据焦面光强度分布函数,通过数值计算简单分析了焦面强度分布、焦点处辐射强度与组合透镜参数的变化关系。针对铜材料组合透镜,分析了组合透镜结构参数、X射线工作波长的选择对组合透镜光学性能的影响。在此基础上,设计了组合透镜的结构参数,使其在硬更多还原

【Abstract】 The x-ray compound refractive lens is a novel refractive x-ray optical device. With the development and application of the x-ray compound lens, x-ray compound lens may find a large spectrum of applications in research and technology.With the data of atom scattering factors, optical constants of some useful material for x-ray compound lens in high-energy X-ray waveband were calculated. It is important to predict the intensity distribution in focusing plane for designing the x-ray compound refractive lenses. On the basis of analyzing the structure of x-ray compound lenses and comparing it with Fraunhofer diffraction system, it is concluded that the x-ray focusing system can be regarded as a kind of Fraunhofer diffraction system. Therefore, a method based on Fourier spectrum analysis is presented to predict the intensity distribution in the focusing plane for the x-ray lenses.The relationship between the parameters of Cu x-ray compound lens and its performance is analyzed. The x-ray compound lens presented in this paper is proposed for sub-micrometer focusing of high-energy x-rays更多还原