【作者】 高晓斌；

【导师】 余晓芬；

【作者基本信息】 合肥工业大学 ， 测试计量技术及仪器， 2005， 硕士

【摘要】 随着MEMS技术的不断发展,越来越多的微器件需要进行精密三维测量。如何快速准确检测微观轮廓形貌,已成为现代精密测试技术与仪器研究的重要课题,所研究的并行共焦探测方法是使微小轮廓的快速高精度检测成为可能。 本项目来源于国家自然科学基金项目“纳米三座标测量机关键技术的研究”和教育部科学技术研究重点项目“基于微光学的多功能三维探测头的研制”。本论文首先概述了并行共焦探测的工作原理和系统的总体结构,然后详细阐述了系统的光路设计及装调结构设计。为克服传统“极大值法”的缺点,提出了一种新的能提高焦点位置辨识精度的图像处理方法,并利用Matlab编制了单点纵向光强分析软件及三维轮廓重构软件。最后给出了研究性实验的目的、内容及结果。更多还原

【Abstract】 With the rapid development of the technology of MEMS, more and more micro-parts of an apparatus are measured. How to measure the 3-D surface topography of the micro-specimens quickly and accurately has become a challenge in the field of modern micro-measurement. It is possible that micro-profile quickly and high accurately is measured on the method of Confocal MeasurementThe research is based on the project sponsored by the National Natural Science Foundation of China (NSFC) and another project sponsored by Important Research Foundation of National Education Ministry of China. In this dissertation, the non-scanning whole-field confocal system and its key technologies are in-depth investigated. The work principle of parallel confocal microscopy and total structure of system are introduced firstly. Then the design of light system and setup of system are analyzed in detail. A new linear fitting method for data processing is presented in order to overcome the influences of the traditional 3-D profile measurement method. A program is finished in order to study the axial optical characteristics of a facula, and 3-D profile reconstruction is solved by the other program. Finally, the purpose, content and result of experimentation are presented .更多还原