【作者】 余才佳；

【导师】 姜澄宇；

【作者基本信息】 西北工业大学 ， 机械电子工程， 2005， 硕士

【摘要】 基于可重用IP(Intellectual Property)的设计方法为微机电系统(MEMS)系统级建模与仿真技术提供了新的思路,有望成为未来的主流。它将MEMS分解为梁、质量块、可变电容器等多个功能结构部件,把这些功能结构部件建立为参数化的组件模型,组件模型按照器件的功能结构布局相互联接形成的网络表征整个MEMS。目前采用该思想建立的组件模型局限于特定的仿真器,通用性差,不能在其他的平台上应用。 本文针对上述不足,研究了MEMS系统级的跨平台建模技术。采用标准建模语言VHDL-AMS,制定了一套面向MEMS设计的通用建模规范:定义了多端口组件模型由端口、行为模型、参数以及示意图构成的一般形式,给出了组件端口的联接准则;然后在此基础上,研究了典型MEMS功能结构部件行为模型和器件网络模型的建模方法,建立了参数化的MEMS组件库。由于采用了国际标准VHDL-AMS,这样编写一次代码就可以在不同仿真平台上实现模型的仿真,增强了MEMS组件库的开放性、可扩展性和跨平台性,为拥有不同仿真器的用户使用MEMS组件库提供方便。 对所建组件模型的准确性,采用有限元分析方法进行验证,仿真结果表明所建模型在适用范围内能够精确地描述相应功能结构部件的行为特性。最后,使用该组件库实现微加速度计的建模与仿真。更多还原

【Abstract】 Reusable Intellectual Property (IP) based method is promising to be the main trend for microelectromechanical systems (MEMS) modeling and simulation at system level. With this method, MEMS are decomposed into several functional components such as beams, plate masses and alterable capacitors. All the components are modeled as parameterized elements and connected to represent the whole MEMS. At present, parameterized elements based on IP method are limited to certain simulator, and can’t be implemented in other simulators.This thesis presents platform-spanning modeling technology at MEMS system level. The international standard hardware description language - VHDL-AMS, is implemented to establish a set of modeling criterion for MEMS design. The common form of ports, behavior models, parameters and schematics are defined, rules of ports connection is also presented. A set of parameterized MEMS elements is then established based on the behavior models of functional parts and network models of devices. Owing to the above work, the codes can be applied on different simulator, which improves the opening, platform spanning and expansibility of parameterized elements.The parameterized elements are validated using finite element analysis (FEA), and the result shows the behavior models are accurate enough. Finally, the microaccelerometer is modeled and simulated using this set of elements.更多还原