【作者】 陈涛；

【导师】 雷明凯；

【作者基本信息】 大连理工大学 ， 材料表面工程， 2005， 硕士

【摘要】 本文针对金属离子高温注入金属Al的工艺特点,进行了离子注入合成金属间化合物预测研究,并与离子注入实验结果进行了对比讨论.鉴于金属离子高温注入金属具有非平衡界面反应特性,预测金属离子高温注入金属合成金属间化合物的有效形成热模型中,有效形成热通过形成金属间化合物的形成热,以及二元合金系的有效浓度中控制元素的浓度和形成金属间化合物的控制元素浓度的比值之积计算。各种将形成的金属间化合物中,对应有效形成热最小的金属间化合物预测为先形成化合物。采用有效形成热模型预测金属离子高温注入金属Al合成金属间化合物,选取金属—Al二元系的最低共晶温度的共晶体（或最低液相温度成分）为有效浓度。与金属离子高温注入金属Al实验结果对比发现,当注入能量50～140 keV,注入剂量10¹⁷～10¹⁸ cm^-2,束流密度10～60μA cm^-2,注入温度300～600℃时,有效形成热模型合理预测了金属Fe,Hf,Mo,Nb,Ni,Ta,Zr离子高温注入分别合成金属间化合物Al₁₃Fe₄,HfAl₃,MoAl₁₂,NbAl₃,NiAl₃,Taml₃,ZrAl₃。考虑到亚稳相形成,有效形成热模型合理预测了Cr离子高温注入金属Al,在400℃形成化合物Cr₁₄Al₈₆,高于400℃形成化合物Cr₂Al₁₃。由于热力学数据精度所限,有效形成热模型预测的V离子高温注入金属Al,金属间化合物VAl₃,V₄Al₂₃,VAl₇和VAl₁₀都可能形成,同时考虑到固态界面上金属间化合物的形核难易程度,模型预测化合物VAl₃形成,实验中也发现仅形成化合物VAl₃。考虑到金属间化合物形成温度的作用,Mo和Ti离子注入金属Al的实验中,注入温度远高于600℃时分别发现MoAl₁₂,MoAl₅和TiAl₃,TiAl双相形成,有效形成热模型不再适用。更多还原

【Abstract】 Considering the technical characteristics of metal ion implantation into metal Al, the prediction of intermetallics formation during metal ion implantation into metal at elevated temperature has been studied, based on the comparison with the experimental results. Because metal ion implantation into metal at elevated temperature possessed the characteristics of non-equilibrium interface reaction, the effective heat of formation model was built to predict intermetallics formation during metal ion implantation into metal at elevated temperature. The effective heat of formation was calculated by the heat of formation of the intermetallics that would form multiplying the ratio of the concentration of limiting element of effective concentration and the concentration of limiting element in the intermetallics. Among the different intermetallics in the metal-Al binary system, the intermetallics with the most negative effective heat of formation were predicted to form first. Adopting the effect heat of formation model to predict the intermetallics formed during metal ion implantation into metal Al, the lowest eutectic (liquidus) was chosen as the effective concentration in the metal-Al binary system. Compared with the experimental results of metal ion implantation into metal Al, the intermetallics Al13Fe4, HfAl3, MoAl12, NbAl3, NiAl3, TaAl3 and ZrAl3 were reasonably predicted to form during metal Fe, Hf, Mo, Nb, Ni, Ta and Zr ion implantation into metal Al by implanted energy of 50-140 keV, implanted dose of 1017~1018 ions cm-2, current density of 10-60 μA cm-2, at the implanted temperature of 300-600 ℃. Considering the formation of meta-stable phase, the effective heat of formation model predicted formation of the intermetallics Cr14Al86 at the temperature of 400 ℃, and Cr2Al13 at the temperature higher than 400 ℃. The intermetallics VAl3, V4Al23, VAl7 and VAl10 were predicted to form due to the precision of the thermodynamic data, taking the nucleation barrier at the solid-state interface into account, intermetallics VAl3 was predicted to form by the effective heat of formation model, and VAl3 was also the only intermetallics formed in the experiment. In view of the formationtemperature of intermetallics, the two phases MoAl12, MoAl5 and TiAl3, TiAl formed in metal Mo and Ti ion implantation into metal Al at the temperature higher than 600 ℃, respectively, where the effective heat of formation model was not valid in the condition.更多还原