【作者】 赵小强；

【导师】 刘月明；

【作者基本信息】 西安理工大学 ， 测试计量技术及仪器， 2005， 硕士

【摘要】 温度是最基本的测量参数之一,在工农业生产过程中,尤其是在易燃、易爆的场合中,准确、安全、可靠地测量温度对保证工农业生产过程的安全性和经济性具有十分重要意义,因此,研制一种能够应用于易燃、易爆环境下的微型化、高精度温度传感器显得非常重要。本文提出了一种新型的双层膜光纤F-P腔温度传感器,该传感器基于Fabry-Perot腔结构,采用Fabry-Perot多光束干涉机理。该传感器F-P腔的上反射镜由双层膜组成,F-P腔的下反射镜由光纤端面抛光后实现,当被测温度发生变化时,由于“双膜效应”而导致上反射镜热挠曲,F-P腔的腔长相应变化,从而导致F-P腔输出的光强发生变化,通过测量光强的变化即可测量相应的温度变化。 本文首先建立了双层膜F-P腔温度敏感的理论模型,给出了优化的双层膜材料和器件结构尺寸,以及输出光强相对被测温度变化的性能仿真曲线;其次采用ANSYS有限元分析软件对器件结构进行了热力学分析,研究了双金属片的温度-应变特性,完西安理工大学硕士学位论文成了光纤双金属片F一P阁感头的制作工艺研究;再次详细介绍了实验系统的构成以及实验方法,根据要求进行了实验,并进行了相应结果分析,实验结果表明:在0一80℃的温度范围内,所设计的F一P温度传感器的测量灵敏度平均为66.82nw/℃,精度为士0.7%;最后根据前面的理论、实验分析结果,设计一种结构相似的硅微机械双层膜F一P温度传感器,对其结构尺寸进行了优化,并对其制作工艺进行了讨论,对其性能进行了仿真,理论分析结果表明:所设计的硅微机械双层膜F一P温度传感器的尺寸仅为SO0um x 500um,测量范围为0一100℃,灵敏度高达3O0n耐℃,且具有很好的线性度。关键词:温度传感器;双层膜;F一P腔;热力学;硅微机械更多还原

【Abstract】 Temperature is one of the most fundamental measurement parameters. Temperature measurement in high accuracy, safe, and reliable manner has great significance in the industry and agricultural production, especially in the flammable and explosive situation. Accordingly, it is important to research and develop a high-accuracy and miniature temperature sensor that can be applied in the flammable and explosive environment. A novel Fabry-Perot temperature sensor has been designed in this paper, it is based on the Fabry-Perot cavity structure and multi-light interference theory. Fabry-Perot cavity’s upper mirror is made up of bi-Iayer membranes and lower mirror is formed by polished fiber end, bi-layer membranes will be deflected in response to changes in ambient temperature because of ’Bi-coating Effect1, then Fabry-Perot cavity depth will be changed, Fabry-Perot cavity ’ s reflectance property will be modulated in step, so when the output light intensity is measured, measured temperature can be determined.Firstly, The theoretical model of Fabry-Perot cavity adapted to the temperature sensing was built and developed in this paper, the sensor structure was optimized: including bi-layer material selection and the sensor’s elements size, and the performance curve of output light intensity versus measured temperature is given by ANSYS simulation. Secondly, Thermalstress of the sensor structure was analyzed by finite element software ANSYS, the characteristic of the displacement versus the applied temperature of bi-layer metal membranes is studied, and the technique of manufacture of the fiber Fabry-Perot sensing head was introduced. Thirdly, the constitute of experiment system and experiment method have been introduced in detail, the experiment was been proceeded and the result of experiment was been analyzed according to the request, the experimental results have shown that the sensor’s average sensitivity can get 66.82nw/℃ and its accuracy is ± 0.7 % when the applied temperature range varies from 0℃ to 80 ℃. Finally, according to theories and experiment result of bi-layer metal membranes temperature sensing, a silicon micro-mechanical Fabry-Perot temperature sensor with resembling structure as the experimental temperature sensing has been designed at the end of the paper, the sensor structure was optimized and the technique of manufacture has been discussed, and the performance of the sensor has been simulated, the results from theoretical analysis indicated that the sensor’s sensitivity can get 300nw/ ℃ and the size of sensor is only 500um x 500um when measured temperature range varies from 0℃ to 100℃. In addition, output light intensity of the sensor varies in good linearity with applied temperature.更多还原