【作者】 肖虹；

【导师】 谢铁邦；

【作者基本信息】 华中科技大学 ， 机械电子工程， 2004， 硕士

【摘要】 接触式测量是目前工程表面测量中应用最为广泛的一种。但传统的接触式测量仪存在测量范围小、精度低、参数少、测量方式不灵活等缺点。而在工程应用中,很多工件的重要工作表面都是具有曲率的表面,这些曲面的表面特征对使用性能有着非常重要的作用。对曲面表面形貌的测量不但要测量表面粗糙度,同时也要测量表面波度和形状误差,这就要求轮廓仪应同时具有高精度和大的量程。为此,研制具有大量程、高精度、多参数的激光干涉式大量程表面轮廓仪非常必要。本文的主要研究内容与工作如下:在激光干涉原理的基础上,对影响干涉条纹的因素进行了分析,并在迈克尔逊干涉原理基础上设计了本测量仪的光学传感部分。同时分析了由于角锥棱镜的光学特性引起的光程差与被测量之间的非线性关系,并提出了补偿办法。通过实验和理论论证,提出了对干涉条纹信号光电接收的简单有效方法,并建立了修正干涉条纹正交信号的数学模型。研制了干涉条纹细分辨向计数电路,并用12位A/D转换实现干涉条纹纳米级细分处理。应用虚拟仪器技术,开发出基于LabWindows/CVI平台的仪器驱动器,编制了具有虚拟仪器面板、功能齐全的应用程序。可方便的设置测量参数,自主选取拟合和滤波方式,给出了二维粗糙度的全部评定参数和三维粗糙度部分评定参数和相关图形显示,并可方便地打印输出。通过对多刻线样板的测量及对滚动轴承内外圈滚道、滚动体等工件的曲面进行的测量,验证了仪器的精度及实用性。仪器的测量范围为±3mm,垂直分辨率为0.01μm 。更多还原

【Abstract】 Contact measurement is most widely used in engineering surface measurement at present. But the old stylus apparatus has some shortcomings such as small measurement range, low precision, few parameters and inconvenient operation and so on. Application in engineering, so many important worked surfaces have curved shape. The characteristics of these curved surfaces will influence use performance. The measurement for curved surface involves not only roughness, but also waviness and shape error. This requires the profilometer owns high precision and large range. So a laser-interference profilometer has been developed to own characteristics of large range, high precision and complete parameters. The main research contents are as follow:Based on the theory of laser interference, the factors that influence the interferential stripe’s are analyzed, and the optical sensor of the instrument is designed. At the same time, the pyramidal prism brings the nonlinear relation in large range between light travel distance and measured displacement is deduced by vector coordinate transforms, compensatory method is also given in this paper.As the conclusion of the reasoning and experimentation with real situation, simple and convenient way for getting better signal of interferential stripes is presented. Besides that, the mathematic model for amending the signal is founded. A circuit is developed to finish subdividing and backward-forward counting of the interferential stripes and the A/D conversion that is used to ensure the fine division of the stripes.Virtual instrumentation technology is applied in this apparatus. Based on LabWindows/CVI, the instrument driver is developed and a complete-function user program with soft virtual panel is programmed. By the soft virtual panel, the user can conveniently set parameters for measuring, and choose the ways for fitting and filtering. The parameters for characterizing 2-D surface are completely given, and ones for 3-D surface are partly given. There are also some necessary graphs in the panel. All of those can be printed out.For verifying its precision and feasibility, the case study is conducted with this system through measuring the reticle templet and the outer and inner roll trails of the roller bearing. The experimental results show that its measurement range is ±3mm, the resolution can reach 0.01μm.更多还原