高精度平面定位与控制技术的研究

【作者】 张健；

【导师】 刘京南；

【作者基本信息】 东南大学 ， 检测技术与自动化装置， 2004， 硕士

【摘要】 精密定位技术是半导体器件制造业、超精密加工、微型机械、电子产品组装生产线、生物工程及纳米技术等研究领域的关键性基础性技术,同时也是一门综合性技术。它涉及到光学、电子、机械、计算机、信息处理、传感与测量、伺服驱动、自动控制及其它一些周边支撑技术。本论文提出了一种利用激光摩尔信号进行高精度位置检测与控制的技术方法,首先分析了两衍射光栅的位移偏差与激光摩尔信号强度的关系,推导出双光栅衍射光强方程,建立了高精度位置检测的数学模型,并通过计算机仿真实验对其规律加以确认。然后在精密直线定位研究的基础上,提出平面定位的运动控制算法,研究多随机初始位置、多运动状态的平面控制策略,完成高精度的全自动平面定位,得到的同步线性精度和的角度精度。针对精密定位系统的非线性特点,将模糊理论及神经网络理论应用于定位控制中,对精密定位的智能控制进行系统的研究,最终实现精密定位的智能化控制,在确保定位高精度条件下,实现高速定位。最后,论文分析介绍了课题进一步的研究方向。更多还原

【Abstract】 The precise alignment technology which can apply to many subjects as exact science and electronic engineering is an important and essential high-tech. At the same time it is also all-around technology and including optics, electronics, mechanics, computer, signal processing, sensor and measurement. This paper presents a technology which detects the position and alignment with moiré signal of laser. It analyzes the relationship between the displace error of two gratings and the intensity of moiré signal, deduces the equation of double gratings diffraction, build mathematics model of high precise position detection and simulate with computer. The plane alignment algorithm is presented based on linear alignment, random multi-state position is researched and fully automatic plane alignment is accomplished. Fuzzy theory and artificial neural network theory is applied to alignment aim at non-linearity and difficulty in modeling, intelligent and high speed alignment is fulfilled.更多还原