【作者】 刘全；

【导师】 吴建宏；

【作者基本信息】 苏州大学 ， 光学， 2004， 硕士

【摘要】 本文围绕着取样光栅的特点和制作开展了理论和实验研究，主要包含了以下几方面的内容： 首先介绍了研究惯性约束核聚变(ICF)的意义和国际上取样光栅(BSG)的研究进展。对光栅衍射理论给出了详细的介绍，并且对其中的二大类理论进行了分析比较，着重研究了矢量衍射理论中的严格耦合波理论。 其次，设计了三种记录全息取样光栅掩模的光学系统，对这三种全息记录光学系统进行了分析比较，并使用光学设计软件ZEMAX分析了它们的像差。 随后，利用严格耦合波理论对取样光栅的衍射效率问题进行了深入地研究，以达到指导取样光栅实际制作的目的。并初步探讨了镀膜条件下，取样光栅的可能结构及其衍射效率问题。 最后，制作了一些小口径取样光栅，并建立了实验检测系统。对取样光栅进行了实验测量和理论对比分析，结果表明这一对比分析对镀减反膜条件下的取样光栅的刻蚀有指导意义。更多还原

【Abstract】 The fabrication and characteristics of beam sampling grating (BSG) are investigated theoretically and experimentally in this paper. The main contents are as follows:Firstly, the significance of the research of the inertial confinement fusion (ICF) and the progress of the research on the beam sampling grating are presented. The diffraction theory of gratings is introduced in details. Scalar diffraction theory and vector diffraction theory are compared. Rigorous coupled-wave theory, which is one of vector diffraction theory, is selected as the foundation of numerical computation.Secondly, three optical systems on recording holographic BSG mask are designed. Their aberrations are analyzed by using ZEMAX.Thirdly, the diffraction efficiency of BSG is discussed by using rigorous coupled-wave theory. The results are useful for fabrication of BSG When the antireflective coating is applied to BSG, the diffraction efficiency of BSG is studied preliminarily.Finally, some small aperture BSGs are fabricated. The detecting system is established. According to this system, the measurement results of the BSG are given and analysis between experimental results and theory calculation are shown. By analysis, some useful informationfor practical etching of BSG is given.更多还原