MEMS器件的计算机辅助设计与模拟方法研究

【作者】 卢凉；

【导师】 杜平安；

【作者基本信息】 电子科技大学 ， 机械电子工程， 2004， 硕士

【摘要】 MEMS是一个新兴的研究领域,其中在对MEMS器件的研制中多是采用传统反复实验的方法。随着理论水平和器件设计复杂度的提高以及人们对器件性能要求的不断提高,传统的设计方法越来越不能满足人们对设计的要求。随着计算机技术的发展,计算机辅助设计在器件开发过程中的作用已经越来越引起人们的注意,特别是在现有的设备对于实验测试还存在不少困难的情况下开展MEMS器件的计算机辅助设计的研究工作也就更具有意义。本文研究了MEMS器件的计算机辅助设计与模拟,给出了MEMS器件计算机辅助设计与模拟的流程,通过两种典型的MEMS器件的设计和分析对其进行了详细的阐述,主要的完成的内容如下:讨论了MEMS器件CAD的特点和设计原则,给出了MEMS器件的设计模拟方法,研究了MEMS器件设计的体系结构,并描述了MEMS器件计算机辅助设计模拟的全过程。设计了两种典型的MEMS器件微开关和微镜,包括结构和工艺,以及它们的驱动原理,对两种器件的加工工艺进行了详细的阐述。对两种器件进行了分析和仿真,包括静电和应力应变分析,重点讨论了器件的力电耦合效应和求解方法,牛顿法和松弛法,然后求解了器件的一些关键性能参数,如pull-in和release电压、接触力,最后对器件进行了优化,并给出了MEMS器件宏模型的概念,说明了提取器件宏模型的重要性和常用的方法。通过对两种典型MEMS器件的计算机辅助设计和模拟,从面到点再到面来研究了MEMS器件的计算机辅助设计和模拟。本文的研究希望能对MEMS器件计算机辅助设计与模拟提供一定的基础,对提高MEMS器件的质量、缩短MEMS器件的开发周期起到一定的作用,推动国内MEMS器件设计水平的发展。更多还原

【Abstract】 MEMS is a rising research domain, and the development of MEMS devices always adopt the traditional methods of trial and error. With the improvement of theory level and complexity of devices design, the traditional ways have not met designers’ needs. Along with the development of computer technology, Computer Aided Design of MEMS devices has aroused designer’s attention, especially, in the condition of the difficulties that the existing equipments have been not satisfied with experiment tests, the research of Computer Aided Design of MEMS devices takes on the significance. In this paper, we researched the methods of Computer Aided Design and simulation of MEMS devices, and provided the process of it. The methods are detailedly explained through the design and analysis of two typical MEMS devices. The performance of this paper is as follows:Firstly, the characteristics and design principles of MEMS devices CAD were investigated, secondly, the methods of design and simulation were presented, thirdly, the system structure of design was researched, finally, the whole process, CAD of MEMS devices, was explored.Two typical MEMS devices, Micro-Switch and Micro-Mirror, are designed, including structure, process and driving principle.Simulation of two devices was carried out, which included electricity and stress-strain analysis. Force-electricity coupling and the algorithm that are Newton and Relaxation were emphatically researched, then some key parameters, such as pull-in and release voltage and contact force, were obtained, the devices were optimized at the same time. Finally the concept of Macro-model was presented, and then the significance and the common approach of extracting Macro-model were investigated.It has been proven that the methods of MEMS devices CAD presented here is feasible through two typical devices design and simulation.Through this paper, it can provide some foundations for CAD of MEMS devices and simulation, improve the quality, shorten the development cycle, and make progress of the domestic design level.更多还原