硅基单反应腔PCR生物芯片的设计与制作

【作者】 刘大震；

【导师】 闫卫平；

【作者基本信息】 大连理工大学 ， 测试计量技术及仪器， 2004， 硕士

【摘要】 生物分析仪器的微型化和集成化发展趋势导致了微全分析系统这一概念的提出。目前，以微细加工工艺为基础的生物芯片技术蓬勃发展，由此而产生的芯片实验室将使微全分析成为可能。本文所研制的聚合酶链式反应(Polymerase Chain Reaction，简称PCR)芯片是生物芯片的一种，是芯片实验室的重要组成部分之一。 PCR技术是一种基因片断体外扩增技术，由于其具有扩增速度快、操作简便等特点，在生物医学等领域获得了广泛应用。在生物芯片上完成PCR扩增可以极大地缩短反应时间，减少试剂消耗，能够取得令人满意的效果。本文根据PCR芯片的发展现状，对芯片的设计和制作进行了研究。 本文在PCR芯片设计中，利用ANSYS有限元软件作为主要的分析工具，对PCR芯片微反应池底部加热器所产生的温度分布和热特性进行了仿真分析，根据分析结果确定了芯片版图设计方案，利用硅基微细加工技术完成了芯片的制作。针对初期制备的铬薄膜电阻温度系数较低的问题，根据薄膜理论分析，研究了影响铬薄膜电阻温度系数的主要因素，根据实验结果不断改进铬薄膜电阻制备工艺，最终制作出了基本满足检测要求的热敏电阻薄膜。本论文还设计了与PCR芯片配套的温度控制系统，该系统以AT89C51单片机为核心，利用A／D变换器等构成数据采集输入通道，采用PID控温算法及PWM技术实现驱动输出，研制出升温迅速、控温准确的PCR芯片温控系统，实现了单反应腔体PCR芯片的三温区热循环和控制。更多还原

【Abstract】 The concept of micro total analysis system has been put forward with the development of miniaturization and integration of analysis instrument in biochemistry. At present, the biochip based on micro-fabrication technology grows,. and "lab-on-chip" will make micro total analysis feasible. The Polymerase Chain Reaction(PCR) biochip researched in this paper is one kind of biochips and an important part of "lab-on-chip".PCR is a kind of DNA amplification technique outside the body, which has been widely applied to biomedicine and other related fields because it is rapid and easy to control. PCR biochip used in PCR shortens reaction time and reduces quantities of rather expensive regents needs, and the result of DNA amplification is satisfactory. The further research on PCR biochip is carried out in this paper.The temperature distribution and the thermal characteristic of PCR biochip are analyzed in this paper by use of ANSYS, a powerful finite element software, and the analysis results proves that the design of PCR biochip is feasible. In order to solve this problem that the temperature coefficient of the Chromium-film resistance fabricated at first was low, the main factors effecting on temperature coefficient are studied in this paper on the basis of film theory and experiments. After the preparation method of the Chromium-film resistance was improved according to experimental results, the relatively ideal chromium film resistance is fabricated. In addition, the temperature-controlled system of PCR biochip is designed, which is based on AT89C51 microcontroller, PID algorithm and PWM technique. The experimental results showed this system is accurate and the rise/fall rates of temperature are rapid.更多还原