基于多孔硅生物传感器原理性研究

【作者】 邵丽；

【导师】 朱自强； 朱建中；

【作者基本信息】 华东师范大学 ， 微电子学与固体电子学， 2004， 硕士

【摘要】 自1990年发现多孔硅具有室温下高效率发射可见光的特性以来，已逐渐成为国际研究热点之一。其中包括基础理论、工艺技术、开发应用等。人们发现它具有若干独特的性能，如极大的比表面、高电阻率、高化学活性等。被誉为“量子海绵”。随着研究的深入，多孔硅已在许多领域获得了广泛的应用，如光电子、微波／射频微电子学、传感器和生物医学等。本硕士论文工作把重点放在多孔硅应用于基因芯片、K~+离子选择性微电极和羟基磷酸钙涂布方面的研究，并取得了如下主要结果： 成功地实现了多孔硅的选择性生长。通过在硅片上淀积2000(?)的Au／Cr膜，或用能量为50KeV的氢离子注入低阻P型硅衬底，形成厚约1μm的高阻层做掩蔽膜，腐蚀生成多孔硅微阵列，该微阵列的有序性和完整性良好。 首次提出了多孔硅在基因芯片中的应用，获得了初步实验结果并申请了中国发明专利。多孔硅对寡核苷酸的固定效率随着孔径的增加而提高，多孔硅芯片的检测灵敏度高于玻片。经4种贮存条件考察，可知多孔硅芯片的稳定性良好。 首次研制成功以多孔硅为衬底的钾离子选择性微电极(K~+ISME)，校正曲线在pK=1.0～4.0的范围内线性，其斜率为56mV，接近于能斯特响应。K~+ISME的长期稳定性较好。2个月内响应的偏差在±2mV之内。 以溶胶-凝胶法成功制得羟基磷酸钙(HAP)，并实现了厚度约20μm HAP溶胶在多孔硅衬底上的涂布。发现热处理可提高HAP的晶格完整性。1000℃热处理大大提高了HAP与多孔硅之间的粘附性。为传感器及集成电路植入人体、减少甚至完全避免生物排异奠定了基础。更多还原

【Abstract】 Since Canham discovered the room-temperature highly-efficient luminescence of visible light from Porous silicon (PS) in 1990, a large number of studies have been devoted to understand all aspects of PS, including basic theory, processing technology, applications widening, etc. PS has many unique properties such as enormous internal surface, high resistance ratio, high chemical activity, etc, praised as "quantum sponge". PS has been developed in many application fields including optoelectronics, microwave/radio frequency microelectronics, sensor, biomedicine, etc. This dissertation focused on studing applications of PS in DNA chip, potassium ion selective microelectrode (K+ISME) and Hydroxyapatite (HAP) coating and also some results have been achieved as follows:Selective PS has been successfully obtained. Both Au/Cr film (2000A) deposited on silicon wafer and highly resistive silicon film (1um) formed by hydrogen ion implantation (50Kev) can be used as masks to produce PS microarrays with good integrity and distribution by selective electrochemical etching process.PS was first used as the substrate to fabricate DNA chip. Some primary experiment results have been achieved. One China invention patent has been applied. The attachment rate of oligonucleotide on PS is increased with the pore diameter. Detection sensitivity of DNA chip based on PS is higher than that based on glass. Also DNA chip based on PS is stable under 4 storage conditions.A PS-based K+ISME with a good performance has been firstly fabricated. The calibration curve for the K+ISME is linear within a wide range of pK = 1.0 ~ 4.0. Its slope is 56 mV per decade, which is near Nernst response. The long-term stability of the K+ISME is good. The variation of the response is within ?2 mV during 2 months.HAP has been successfully prepared by sol-gel method. HAP(20um) was successfully coated on PS substrate. It was found that rapid thermal annealing (RTA) process is able to enhance crystallinity of HAP. And the thermal treatment at 1000C conglutinates the HAP layer tightly with the PS substrate. That will benefit implantation of sensors and IC in human bodies so as to reduce and even entirely avoid biological rejection.更多还原