【作者】 杨润；

【导师】 潘永湘； 薛抗美；

【作者基本信息】 西安理工大学 ， 电气工程， 2003， 硕士

【摘要】 本文基于电力电子理论，采用全控型电力半导体器件IGBT，研制了适用于激光晶体生长设备的中频感应加热电源。在综合比较和分析并联谐振、串联谐振的感应加热电源的基础上，提出了系统的总体设计方案。并对系统主电路的元器件参数进行了详细的计算；设计了以CMOS数字锁相环CD4046为核心、以80C196KC作为辅助控制器的逆变控制电路；采用了模糊逻辑与锁相环相结合的控制技术，提高了电源的启动成功率；采用电流、电压双闭环反馈方案，采用槽路电容电压和槽路电流作为反馈信号，从而保证了电源功率的输出精度。与此同时，还设计了中频感应加热电源的各种保护电路和中频电源的生产图纸，研制了一台样机。对样机调试和测试结果表明，所设计的中频感应加热电源在2～10KHz范围内，能够满足多种生长激光晶体工艺的要求。与国内同类产品相比，具有工作频率范围宽、长期工作稳定性好的特点。更多还原

【Abstract】 In this paper, a parallel-resonance induction heating power for equipments that used to grow laser crystal has been developed, it applies power electronics theory and adopts full-controllable electric semiconductor device IGBT. At synthesize comparison and analyze parallel-resonance and series-resonance induction heating power, whole system scheme is presented, we make the calculating in detail to all the devices in use. we design inversion control circuit with CMOS figure PLL CD4046 act as core and microprocessor 80C196KC act as assistant controller. Adopting a control method that combine Fuzzy controller and PLL control, improve induction heating power succeed in startup. Adopting electric current voltage pair closed loop feedback design, with trough route capacitance voltage and trough route electric current act as pair closed loop feedback signal , guarantee induction heating power output accuracy. And design perfect protective circuits. On the basis of these, design machining drawing of medium frequency induction heating power, and produce a prototype of a machine, debugging and testing to prototype of a machine. The results show that induction heating power using IGBT does well, frequency that ranged from 2~ 10KHz, satisfied all technology requirements that grow many kinds laser crystal.更多还原