【作者】 任韧；

【导师】 陈长乐；

【作者基本信息】 西北工业大学 ， 光学工程， 2002， 硕士

【摘要】 准分子激光在工业制造、科学研究、生物医学、核聚变、光电子、半导体等重要的课题研究领域上有广阔的发展远景。特别是准分子激光在光电材料、光电技术上有得天独厚的优良性能。因此本文以气相沉积、外延生长、巨磁薄膜、金刚石及其它薄膜制备及后续的光刻，激光与物质的相互作用，等离子体研究为目的，研制获得了激光脉宽18ns，单脉冲能量150mJ，矩形光斑大小2cm×1cm，束散角3mrad，最高重复频率5HZ的XeCl准分子激光器。 本论文首先对准分子激光特点，原理，脉冲放电进行了评述，其次，以试制XeCl准分子激光器为目的，探索并完成了电极设计、回路电感减小方法、火花开关设计、ns陡前沿放电、紫外预电离、辉光放电、脉冲功率技术研究。针对目前准分子激光结构采用了简化结构，进行了物理设计，工程设计，实现了较大激励体积，尤其在实现电路的可靠性，独立性，安全性，充配气系统的密封准确配比上作了大量工作。准分子激光器具有电极试制代价小，电感低，激光脉宽为18ns等特色。 最后论文对试制成功的准分子激光器参数进行了测试。试验结果表明激光特性良好，与同类相比，准分子激光装置激光输出情况良好。更多还原

【Abstract】 The XeCl Excimer Laser have broad applications in industry manufacture, scientific research, biomedical engineering, nuclear fusion, photoelectron, semiconductor etc. Today, the excimer laser has been used in the serial of haloid excimer laser mainly, such as XeCl, KrF, XeF, ArF excimer laser. Due to great advantage of the Excimer Laser in photoelectron material, photoelectron technology research, so in this thesis, a XeCl excimer laser is designed in order to solve some problem in semiconductor film, CMR film, quartz film and other kind of film application, optical etching field, interaction between laser and material, material plasma study. The parameters of the excimer laser is e also measured and analyzed. The pulse duration time is 18ns, and the pulse energy is 120mJ, beam divergence angle is 3mrad, maxium repetition fequency is 5HZ.Firstly, the paper discusses the characters, principles of Excimer Laser, and study on pulse discharge process. Secondly, for the purpose of designing Excimer Laser, I spent a lot of time to researsh and finish electrode designing, reducing circuit inductance, spark gap designing, ns discharge, UV preionization, glow discharge. Finally we got a new Excimer Laser, which has simple structure, higher pump intensity, larger activate volume.At last we measure parameters of new Excimer Laser, the experimental measuring results show that our XeCl Excimer Laser has better characters, and its output is excellent compared to others. So it can be used in research work. The paper also analyses the development direction of Excimer Laser in the future.更多还原