ZnO荧光薄膜的制备及特性研究

【作者】 边超；

【导师】 张兵临； 姚宁；

【作者基本信息】 郑州大学 ， 凝聚态物理， 2003， 硕士

【摘要】 本课题采用直流反应磁控溅射的方法，在镀有透明导电薄膜ITO的玻璃衬底上制备了ZnO荧光薄膜，改变了以往研究者在硅衬底或蓝宝石衬底上制备ZnO薄膜的方法，因此制备的样品可以直接作为阳极荧光屏用于场发射平板显示器。实验采用提高衬底温度、改变反应气氛中的氧氩比，以及退火处理的方法优化荧光层的性能。通过XRD、SEM、四点探针对样品的结构、形貌、导电特性进行了测试，利用荧光光谱仪、亮度计对样品的光致发光和阴极射线发光特性进行了分析。研究了ZnO薄膜的结晶状况、成分、点缺陷浓度等因素与其发光特性之间的关系。实验表明，高的结晶质量和一致的C轴取向性是ZnO薄膜受激可发射紫外光及蓝绿光的一个首要前提。同时为了得到高效的蓝绿光的发射，薄膜中必须含有适量的氧空位及锌填隙的数目。对于结晶质量较差的ZnO薄膜，由于其内部位错、晶界等缺陷的影响，不仅发光的强度较弱，而且呈现出橙、红、紫多谱带发光的特性。更多还原

【Abstract】 Zinc oxide fluorescent thin films were deposited by reactive DC magnetron sputtering on glass substrates coated with tin-doped indium oxide (ITO) thin films. The substrates were different from those silicon or sapphire substrates that were usually used to fabricate zinc oxide films by some anothers. Therefore the films can be used as anode phosphor films in field emission displays (FED) directly. In order to optimize the phosphor thin films, the substrates temperature was increased and the ambience of the reaction was changed gradually. Furthermore the samples were annealed after deposition. X-ray diffraction (XRD), scan electron microscope (SEM), four point probe were employed to characterize their structure, morphology, electrical resistivity. Photoluminescence and cathode-luminescence characteristics of these films were studied by fluorescence spectrophotometer and light intensity meter, respectively. The relations between the luminescence of zinc oxide thin films and their character including crystal structure, composition, the intrinsic defect, etc were investigated. It suggested that high crystal quality with strong orientation is important for UV and blue-green emission from ZnO films. Moreover there should have adequate oxygen vacancies and zinc interstitials for blue-green luminescence. The luminescent intensity of the ZnO thin films with poor crystal structure were very weak and various luminescence such as orange, red and violet band occurred, due to the effect of a large number of structural defects such as dislocation, grain boundary and so on.更多还原