【作者】 周听飞；

【导师】 聂祚仁；

【作者基本信息】 北京工业大学 ， 材料学， 2003， 硕士

【摘要】 为了解决电子发射体(阴极)研究方法中存在的问题，并寻求一种适当的、方便的阴极研究实验方法，本论文论证了建立与AES相连的PLD装置的必要性和可行性，并实际建立了这一装置，实现了阴极的原位沉积、原位分析。 电子发射现象是在电子发射体表面发生的物理过程，发射表面是由活性元素构成的动态平衡系统，这一系统直接决定电子发射性能。表面分析手段对阴极研究是必不可少的。PLD是制备薄膜的最好方法之一，PLD制备薄膜具有膜成分容易做到与靶成分一致，沉积条件容易控制、沉积速率高、实验周期短、应用范围大的特点。PLD适合少样品、多批次、薄膜质量要求高的阴极研究。 俄歇能谱仪是重要的表面分析手段，具有很多优点，适合于阴极研究。国产的四倍频YAG激光器价格低、性能稳定、能输出绿光和紫光，光束聚焦后能达到镀膜要求。与准分子激光器进行了比较，YAG激光器有高的性价比。 通过对AES进样室的改造，实现了AES与PLD的相连，也就实现了阴极薄膜的原位制备、原位分析。实际建立的系统包括激光器、外光路系统、真空制样室、俄歇能谱仪、电子发射测量仪。镀制了镧钼阴极，对镧膜进行了原位的成分分析。实验证明装置是可以使用的。更多还原

【Abstract】 To find a proper and convenient way in electron emitter research, in the paper, We have discussed the essential and possibility of setting up a new PLD (pulsed laser deposition) device which connects with AES (Auger energy spectra), and built such device in order to complete cathode deposition and analysis without exposing to the atmosphere and carried out cathode in-situ preparation and analysisElectron emission phenomenon is a physical process taken place in surface of electron emitter. The emission surface is composed of active elements which reach a dynamic balance system determining the capability of cathode. Therefore, surface analysis is necessary for cathode researches .PLD is one of the best ways to deposit film and has some merits over other preparation technique. By means of PLD, it is easy to achieve ingredient homology between film and target. Moreover, the deposition experiment condition is easy to control with a high deposition rate, a short deposition cycle and a wide application. In a word, PLD can be met with the cathode research requirements which need less quantity, more batches, and higher quality.AES is a important analysis in surface study and has many advantages in cathode research .The quadruple frequency YAG laser made in China is cheap and steady. This kind of laser can output two beams of green and violet. After focused, the laser beam is totally meted with the requirements of PLD. Compared with excimer laser, YAG laser have higher efficiency.By means of modifying the vacuum chamber of AES, the research has realized the joint between AES and PLD. That is, it has realized the in-situ deposition and in-situ analysis in cathode. The total system comprise laser, external ray system, vacuum chamber, AES and emission electron surveyor. Through this device, La -Mo cathode was deposed and analyzed without exposed to the atmosphere. The experiment has proved that system is efficient.更多还原