【作者】 鄢波；

【导师】 吴玉程；

【作者基本信息】 合肥工业大学 ， 材料学， 2002， 硕士

【摘要】 随着信息社会的发展，人们对显示、数据存储、能源等方面的光学和电子器件的要求越来越高。纳米有序体系由于其优于单相材料的性质引起了人们广泛的兴趣。在人们目前所研究的模板中，于酸性溶液合成的阳极氧化铝膜（anodic aluminum oxide films，下文简称AAOF）带有呈六角排列的纳米孔阵列。这种理想结构一出现就引起了人们极大的研究热情，并由于其化学和热力学稳定性以及和现有微电子工艺较易兼容的特点迅速成为合成有序纳米体系的理想模板。 TiO₂是一种廉价、高活性、安全无污染且性能稳定的半导体材料，广泛的应用于电介质材料，光催化薄膜，减反射涂层，氧传感器，湿度传感器以及电色窗等。但体相的二氧化钛还存在着一些不足：半导体载流子的复合率高，量子效率低；半导体的光吸收波长窄（主要在紫外区）。 本文在电化学阳极腐蚀合成Al₂O₃有序阵列模板的基础上，采用脉冲直流电沉积的方法成功的合成出了TiO₂/Al₂O₃纳米有序阵列功能结构，并对它们的物性进行了研究。所获得的主要结果和结论如下： 1)阳极电解槽中，以草酸为电解液在适当的条件下合成出高度有序的Al₂O₃有序阵列模板。模板有序孔直径为50nm，孔与孔之间间距为60nm，完整有序的区域约为1～2μm； 2)平板上沉积出了半导体二氧化钛光电功能膜的前驱体，发现了最佳沉积工艺； 3)用脉冲直流电沉积的方法选择适当的脉冲电压与脉冲时间在Al₂O₃模板纳米孔道中成功合成出TiO₂纳米有序阵列结构，研究发现该结构的本征光吸收限发生红移。更多还原

【Abstract】 With the development of modern information society, the requirement of electronic and photic devices such as display ,data storage and energy are more and more critical. Because of its ideal characters, the ordered nanostructure has caused many interests. At present ,There are many enthusiasm on anodic aluminum oxide films(AAOF) grew in acid solution for its hexagonal cell structure . These unique structure features and its thermal and chemical stability make AAOF become ideal templates for the fabrication of ordered nanostructrues. It is compatible with present microelectronics technology.TiO2 is a cheap, high activities, safe and non-pollution semiconductor material. It is widely used in insulation ,photocatalytic materials ,reflection reducer, oxide sensors, humidity sensors and electro-colored windows. But its body phase has many defects such as high recombination of conductors, low quantum efficiency and narrow wavelength range of photo absorption (mainly in ultraviolet).The technique of the electrochemical anodization was employed to synthesize A12O3 highly ordered array templates. TiO2 ordered nanostructure was successfully fabricated by pulsed electrodeposition, and its physical properties was studied. The main results and conclusion can be summarized as follow:1) The highly ordered array alumina templates with the pore diameter of 50-60 nm, the pore distance of 60nm and ordered domain of l-2um were synthesized by means of anodic oxidation under condition of the constant anodic voltages and certain temperature;2) TiO2 photic and electronic film was deposited on carbon and copper plates. And a optimal process was found to deposit this film;3) TiO2 ordered nanostructure was successfully fabricated in pores of A12O3 ordered templates by means of pulsed electrodeposition with proper pulse voltage and pulse time. The absorption limitation of ordered nanostucture of TiO2/ A12O3 is found.更多还原