【作者】 李俚；

【导师】 李尚平；

【作者基本信息】 广西大学 ， 机械制造及其自动化， 2002， 硕士

【摘要】 本文介绍了自行研制的用于检测超精表面的扫描隧道显微镜(Scanning Tunnelig Uicroscope以下简称STM)样机及相关的检测技术。该样机具有结构简单，使用方便，检测方式简单，高分辨率、三维处理图像等特点。本文主要研究内容如下： 研究STM用于工程上超精表面纳米形貌检测原理，并提出了通过调整偏压和隧道间隙来实现不同分辨率的检测方法以及影响分辨率的几种因素。 根据工作台的电压——位移特性，采用了提高重复性扫描的单向扫描法。经分析统计，开发了一种消除工作台扫描非线性误差的实时扫描补偿技术，使该误差影响小于4％。 通过分析STM的控制现状，提出采用模拟电路实现STM的反馈控制，详细研究了反馈回路各单元电路的设计方法及工作原理并对反馈回路进行了参数补偿。本文利用N-MOS功率管和运算放大器组成P-MOS等效电路，开发了用单极性的N-MOS功率管组成的准互补对称驱动电路，获得了很高的稳定直流驱动电压，实现较宽的扫描范围。 研制了一种新的用于制备STM探针的腐针电路，并利用此电路对影响腐针效果的几个因素进行了研究，得出制备探针的最佳组合条件和方法。 采用自行研制的STM设备，成功检测了一些典型试件如：块规，硬质一 摘要 合金，磨削试件、光栅等超精表面的微观形貌，并证明其具有urn级分辨 率。 通过检测超精表面微观行貌，从微观角度观察到微观形貌的结构和缺＠陷特征；了解相应的超精加工机理和产生加工缺陷发生的原因；可以对微 观表面形貌进行特征识别JTM为超精加工表面进行微观表面质量评价提 供了可靠的检测手段。 利用STM多分辨率技术，对超精表面形面貌展开了用分形维方法研究 表面特征和用三维表面参数对超精羡面质量进行评价 测试实验表明，用STM进行超精表面质量检测是一种可行的、有理论． 研究意义及实用价值的方洁。更多还原

【Abstract】 This paper describes the self-developed Scanning Tunneling Microscope (STM) that used for the ultra-precision surface measuring and correlative measuring technology. The instrument have some characteristics such as the simpleness in structure and working mode, the convenience in use, high resolution, the three-dimension image and so on . The main content of this thesis can be described as following:The measuring principle of STM used for the nan- topography measuring on the ultra-precision surface and the measuring methods with different resolution have been dealt with by adjusting the bias and tunnel gap.Based on the relationship of the drive voltage and the displacement of the scanning table, a scanning method with high repeated accuracy , the so called one -way scanning ,is studied by statistical analysis, a real -time scanning technique with function of compensating nonlinear error has been developed and applied. The nonlinear error has been reduced less than 4%.By comparing and analyzing, a control circuit and device have been developed: a scheme of applying analog circuit to realize the feedback control of STM is proposed, at the same time, the design and principle of each element of the feedback circuit are discussed in detail and the parameters of feedback circuit have been compensated; High stabile volts d.c. has been achieved by the prep inter-symmetry circuit that makes up of monopole N-MOS power and P-MOS equivalent circuit which is composed of N-MOS power and amplifier.A new etching circuit of tips for STM and the experiment about this circuit are reported, by experiment several factors, which affect the curvature radius of the tips, are analyzed. The best way to make the tips under the concerned conditions is found.By using the self-developed STM, it is successful to measure sometypical samples, such as: the polished surface of standard samples, hard alloy, grating, different kinds of grinding samples, etc .the nm scale resolution of STM has been verified.By measuring the nan- topography on the ultra-precision surface, we can observe the configuration and limited character of the nan- topography, and know about the ultra-precision machining mechanism and the effect of the factor on the micro-surface that made the machining limitation, and identify the character of the nan- topography. The instrument provided the credible measuring means for ultra-precision surface quality evaluation.According to the several resolutions technique of STM, we have discussed ultra-precision surface character with the technique of fractal dimension and surface quality evaluation.The measuring experimentations have indicated that it is feasible, significative and well-founded for ultra-precision surface quality measuring by STM.更多还原