【作者】 程新利；

【导师】 许裕生；

【作者基本信息】 苏州大学 ， 凝聚态物理， 2001， 硕士

【摘要】 本论文主要研究了Fe-Zr-B磁性薄膜的制备工艺和结构性能，获得了良好性能的薄膜，并讨论了其中的机理。文中采用直流磁控溅射技术制备了Fe-Zr-B薄膜，利用XRD，TEM，XPS，穆斯堡尔谱学等测试方法对薄膜的结构进行了表征。结果表明沉积态的薄膜均为非晶态，XPS显示沉积态薄膜表面Fe，Zr，B元素均有不同程度的氧化，较深层部分以Fe、Zr、B结合为主，这是由于制备好的样品在大气中保存造成的。穆斯堡尔谱为展宽的六峰谱，相对于零速度峰比较对称，为典型的非晶合金谱。分布参数程序拟合结果显示薄膜内没有形成可以检测的α-Fe相，Zr，B的存在使磁超精细场分布呈双峰结构，并且使Fe原子核处超精细场下降。 合适工艺下制备的Fe-Zr-B薄膜经过热处理后，又利用XRD，TEM，VSM等对薄膜的结构和磁性能进行了测试。结果表明薄膜在550℃退火90分钟后，XRD谱中出现了尖锐的衍射峰，分析认为薄膜退火后已形成部分bcc相，峰为（110）面衍射峰。VSM表明薄膜经过热处理后，磁性能得到了改善，在200kA/m磁场激励下薄膜的磁感应强度达到了1.42T，薄膜矫顽力明显下降，这是退火后薄膜已成为bcc相和非晶相混合结构的缘故。更多还原

【Abstract】 The development of electronic and magnetic instruments encourages investigation of soft magnetic film materials nowadays .As a kind of good soft magnetic materials, Fe-Zr桞 have aroused great attention to researchers and lots of research work have been done. In this dissertation, Fe梈r桞 thin films have been prepared, then their structures, properties have been studied and the mechanisms of good soft magnetic has been explainpd Fe梈r桞 thin films were deposited on common glass substrates by DC magnetron sputtering technique with Fe梈r桞 ternary alloy target. The microstructures of as梥puttered Fe梈r桞 thin films were characterized by several analysis techniques, such as XRD,TEM, XPS, M鰏sbauer Spectroscopy and so on . The results show that the as梥puttered films are amorphous ; Fe, Zr, B elements were partly oxidized on the surfaces of films and the combination of Fe梈r and Fe桞 are mainly in deeper part. M鰏sbauer Spectroscopy shows six expanded peaks and is symmetrical relative to zero velocity peaks: No analyzable a桭e bcc phase formed; Zr and B atoms around Fe atoms cause the reduction of hyperfine field at Fe nucleus and make the distribution of magnetic hyperfine field give two peaks. The Fe梈r桞 thin films prepared under proper sputtering parameters were annealed at different temperature for ninety minutes and tested by XRD,TEM, VSM .The results show that there is a sharp diffraction peak in XRD spectrum of the film annealed at 5500C ;The films had partly crystallized by annealing and the diffraction peak was thought to be the preferred (110) peak . The results of VSM show that the magnetic properties of thin films have been improved greatly; The magnetization at an applied field of 200kA/m (B2(~) is 1.42T and the coercivity had decreased greatly ,The annealed films consist of bcc phase and amorphous phase and the consistence of two phases is good to decrease the magnetic anisotropy and make films exhibit good soft magnetic properties.更多还原