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通过使用无掺杂的Al0.8Ga0.2N条状薄层结构提高无电子阻挡层的AlGaN深紫外激光二极管的性能(英文)

Enhancing the performance of AlGaN deep-ultraviolet laser diodes without an electron blocking layer by using a thin undoped Al0.8Ga0.2N strip layer structure

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【作者】 桑習恩王芳刘俊杰刘玉怀

【Author】 SANG Xi-en;WANG Fang;LIU Jun-jie;LIU Yu-huai;International Joint-Laboratory of Electronic Materials and Systems of Henan Province, International Joint Research of Electronic Materials and Systems, School of Electrical and Information Engineering,Zhengzhou University;International Joint Laboratory for Integrated Circuits Design and Application, Ministry of Education;Research Institute of Industrial Technology Co., Ltd., Institute of Intelligence Sensing, Zhengzhou University;Zhengzhou Way Do Electronics Co.Ltd.;School of Electrical and Information Engineering, North Minzu University;

【通讯作者】 王芳;刘玉怀;

【机构】 郑州大学电气与信息工程学院电子材料与系统国际联合研究中心河南省电子材料与系统国际联合实验室教育部集成电路设计与应用国际合作联合实验室郑州大学智能传感研究院郑州大学产业技术研究院有限公司郑州唯独电子科技有限公司北方民族大学电气与信息工程学院

【摘要】 基于AlGaN的深紫外激光二极管因电子泄漏和空穴注入效率低下而面临性能挑战,且传统电子阻挡层的极化效应会加剧这些问题。为克服这些限制,本文提出了一种无电子阻挡层的深紫外激光二极管设计方案,在最后一个量子阱之后引入了一层1 nm厚的未掺杂Al0.8Ga0.2N薄条状层。通过PICS3D仿真,本文评估了其光学和电学特性。结果表明,有效电子势垒高度显著增加(从158.2 meV增至420.7 meV),而空穴势垒高度则从149.2 meV降至62.8 meV,这增强了空穴注入并减少了电子泄漏。优化后的结构(LD3)输出功率提升了14%,斜率效率提高至1.85 W/A,而且降低了阈值电流。该设计还减弱了量子局域斯塔克效应,并形成了双空穴积累区,从而提高了复合效率。本文的研究成果为适用于高功率应用的高性能、无EBL深紫外激光器提供了一种极具前景的解决方案。

【Abstract】 AlGaN-based deep-ultraviolet(DUV) laser diodes(LDs) face performance challenges due to electron leakage and poor hole injection which is often worsened by polarization effects from conventional electron blocking layers(EBLs). To overcome these limitations, we propose an EBL-free DUV LD design incorporating a 1-nm undoped Al0.8Ga0.2N thin strip layer after the last quantum barrier. Using PICS3D simulations, we evaluate the optical and electrical characteristics. Results show a significant increase in effective electron barrier height(from 158.2 me V to 420.7 meV) and a reduction in hole barrier height(from 149.2meV to 62.8 meV), which enhance hole injection and reduce electron leakage. The optimized structure(LD3)achieves a 14% increase in output power, improved slope efficiency(1.85 W/A), and lower threshold current.This design also reduces the quantum confined Stark effect and forms dual hole accumulation regions, improving recombination efficiency.

【基金】 Supported by National Natural Science Foundation of China(No.62174148);National Key Research and Development Program(No.2022YFE0112000);Key Program for International Joint Research of Henan Province(No.231111520300)~~
  • 【文献出处】 中国光学(中英文) ,Chinese Optics , 编辑部邮箱 ,2026年02期
  • 【分类号】TN31;TN248
  • 【下载频次】14
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