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真空热压法制备高导热金刚石/Cu-B基复合材料
Preparation of high thermal conductivity diamond/Cu-B based composites by vacuum hot pressing sintering
【摘要】 金刚石/Cu基复合材料因具有高导热低膨胀的优异特点,已成为热管理材料领域的研究热点。本文采用低温短时真空热压法制备出B掺杂金刚石/Cu-xB基复合材料(质量分数x=0.2%、0.4%、0.6%、0.8%),研究了B掺杂对复合材料界面结合状况及热学性能的影响。EDS能谱和X射线衍射(XRD)分析证实,在金刚石/Cu界面处形成了碳化硼(B4C),且碳化硼的生成量随B含量的增加而增加。适量B元素掺杂可改善金刚石/Cu界面结合状况,是提升复合材料热导率的有效途径。测定结果显示,当B掺入质量分数为0.2%时,复合材料的热导率从284 W/(m·K)提高至713 W/(m·K),热膨胀系数为6.4×10-6K-1,可满足半导体器件的应用要求。
【Abstract】 Diamond/Cu-based composites have become a research hot-spot in the field of thermal management materials due to their excellent characteristics of high thermal conductivity and low thermal expansion. In this paper, B-doped diamond/Cu-xB composites( mass fraction x=0.2%、0.4%、 0.6%、0.8%) were fabricated by a low-temperature short-time vacuum hot pressing method, and the effects of B doping on the interfacial bonding conditions and thermal properties of the composites were investigated. EDS and XRD analyses confirmed that boron carbide(B4C) was formed at the diamond/Cu interface, and the amount of B4C increased with the increase of B content. Appropriate B doping can improve the interfacial bonding conditions of diamond/Cu and is an effective way to enhance the thermal conductivity of the composites. The measurement results show that when the B doping amount is 0.2%, the thermal conductivity of the composites increases from 284W/(m·K) to 713W/(m·K), and the coefficient of thermal expansion is 6.4×10-6K-1, which can meet the application requirements of semiconductor devices.
【Key words】 diamond/Cu-B; vacuum hot press sintering; heat conductivity coefficient; electronic packaging;
- 【文献出处】 超硬材料工程 ,Superhard Material Engineering , 编辑部邮箱 ,2026年03期
- 【分类号】TB33
- 【下载频次】25