【摘要】 非晶丝具有低磁滞损耗、高灵敏度和低磁各向异性等优点，在弱磁传感领域具备广泛的应用潜力。设计并制备了一种基于钴基非晶丝的微型化巨磁阻抗(giant magneto impedance, GMI)弱磁传感器。该传感器选用钴基非晶丝作为磁敏材料，通过微机电系统(MEMS)技术制备了环绕钴基非晶丝的三维微线圈。通过电镀工艺实现了非晶丝与焊盘的电连接。所制备的非晶丝磁传感器最终尺寸为5.56 mm×1.39 mm×0.65 mm。采用磁场标定系统进行传感器性能测试。测试结果表明：在0～50 000 nT的磁场范围内灵敏度为587 mV/Oe,线性度为99.67%。表明所制备的微型非晶丝GMI弱磁传感器具备高灵敏度特性。此外，通过对样品输出信号的测试，结果也显示器件具有高度的一致性。更多还原

【Abstract】 Amorphous wires exhibit broad application potential in weak magnetic sensing field due to their advantages such as low hysteresis loss, high sensitivity, and low magnetic anisotropy.This paper designed and fabricated a miniaturized giant magnetoimpedance(GMI) magnetic sensor based on a cobalt-based amorphous wire.The sensor utilized a cobalt-based amorphous wire as the magnetosensitive material.A three-dimensional microcoil surrounding the cobalt-based amorphous wire was fabricated using micro-electro-mechanical systems(MEMS) technology.The electrical connection between the amorphous wire and the bonding pads was achieved through an electroplating process.The final dimensions of the fabricated amorphous wire magnetic sensor were 5.56 mm×1.39 mm×0.65 mm.The performance of the sensor was tested using the magnetic field calibration system.Test results show that within the magnetic field range of 0～50 000 nT,sensitivity is 587 mV/Oe, with a linearity of 99.67%.These results indicate that the fabricated miniaturized amorphous wire GMI magnetic sensor exhibits high sensitivity.Furthermore, testing the output signals of the samples also revealed that the device is highly consistent.更多还原