【摘要】 超导约瑟夫森结基于可观测的宏观量子效应，是推动精密计量、弱磁探测、太赫兹混频等弱电应用发展的核心部件。相比低温超导约瑟夫森结，高温超导约瑟夫森结在制冷能效、上限工作频率等方面具有显著优势，然而在可控及可重复制备方面一直面临挑战。作为一种亚纳米级精度、直写式微纳加工新方法，聚焦氦离子束技术正逐渐应用于高温超导约瑟夫森结的制备与研究。文章将从技术发展历程、器件制备优势、前沿应用案例及未来前景等方面介绍聚焦氦离子束技术。更多还原

【Abstract】 As an observable macroscopic quantum phenomenon, superconducting Josephson junctions drive the development of quantum metrology, weak-magnetic field sensing, terahertz mixing, and other weak-signal applications. Compared with low-temperature superconducting Josephson junctions, high-temperature superconducting(HTS) Josephson junctions can lower refrigeration costs and raise device operating frequencies. However, their controllable and reproducible fabrication has remained a challenge. With sub-nanometre precision and mask-free direct writing, focused helium-ion-beam technology is now being applied to the fabrication and research of HTS Josephson junctions. This technology will be reviewed from four perspectives: its evolution, its advantages in HTS device fabrication, frontier applications, and future prospects.更多还原