【摘要】 随着工业向着自动化、智能化、高精度的方向不断发展，人们对位移测量技术的精度、实时性和可靠性提出了更高的要求，零差激光干涉测量作为位移测量领域的重要方法，测量过程具备非接触式、溯源性高等特点，得到越来越广泛的应用。基于相位细分技术能够在保证激光干涉仪能够在高分辨率的同时实现大范围测量，但是非线性误差的存在极大地限制了零差激光干涉仪的应用。从零差激光干涉仪的信号特点出发，分析了目前存在的在零差激光干涉仪正交正余弦干涉信号对中的误差，并对由信号中误差导致的位移测量结果相对于真实位移的畸变情况(即非线性误差)及非线性误差成因分析的相关研究进行了整理。进一步总结了近年来，零差激光干涉仪的非线性误差校正的发展现状。最后对零差激光干涉仪信号处理技术的发展趋势进行了总结和展望。更多还原

【Abstract】 With the continuous advancement of industry toward automation, intelligence, and high precision, there are growing demands for improved accuracy, real-time performance, and reliability in displacement measurement technologies.As a key method in this field, homodyne laser interferometry is characterized by its non-contact measurement process and high traceability, leading to increasingly widespread application. Phase subdivision technology enables laser interferometers to achieve high resolution over a large measurement range. However, the presence of nonlinear errors significantly restricts the use of homodyne interferometers. Starting from the signal characteristics of homodyne interferometers, this paper analyzes existing errors in the orthogonal sinusoidal-cosinal interference signal pairs of homodyne interferometers. This article reviews research on the distortion of displacement measurement results due to signal errors compared to the actual displacement(nonlinear error) and the causes of nonlinear errors. Furthermore, the recent developments in correcting nonlinear errors in homodyne interferometers are summarized. Finally, the trends in signal processing technology for homodyne laser interferometers are outlined and future prospects are discussed.更多还原