【摘要】 微纳光学、生物医疗、航空航天等领域的快速发展，对微纳结构制备技术提出了更高要求，亟需实现高精度、深尺寸、高效率的加工。为解决上述问题，超快复合双光束激光微加工技术应运而生，其通过将单个飞秒光束拆分为具有可控时间延迟的双光束序列，实现对材料电子动力学的主动调控：前导脉冲诱导种子电子与亚阈值改性，后续脉冲在优化的瞬态电子态下实现高效能量沉积，可显著提升激光能量的利用率、抑制热影响区范围及扩展结构形貌的调控自由度。常用的双光束产生方式主要包括可调光延迟线法、时空脉冲整形法以及双折射晶体法等，搭配飞秒-飞秒、飞秒-皮秒以及飞秒-长脉冲等多种复合双光束组合，已在金属、半导体、电介质等多种材料上实现了高质量周期性表面结构、高深径比微孔及功能化表面的可控制备。当前，该技术在理论建模、实验方法及工艺应用方面已形成较为系统的研究体系，正逐步从机理探索走向功能导向的应用拓展。系统综述了超快复合双光束激光微加工的原理、产生方式、复合种类与前沿应用，旨在梳理其发展脉络，为相关领域的研究与工程实践提供参考。更多还原

【Abstract】 Significance With the rapid development of micro/nano-optics, biomedicine, and aerospace, conventional single-beam femtosecond laser processing faces bottlenecks such as strong plasma shielding, narrow processing windows, and the inability to modulate transient material states. To overcome these challenges, ultrafast dual-beam laser microfabrication technology has emerged. By dividing a single femtosecond pulse into a dual-pulse sequence with a controllable delay, this technology enables active modulation of the electron dynamics within the material. The leading pulse induces seed electrons and sub-threshold modifications, while the subsequent pulse achieves highly efficient energy deposition under the optimized transient electronic state. This approach significantly enhances laser energy utilization, suppresses the heat-affected zone(HAZ), and expands the degrees of freedom for tailoring structural morphologies. This review systematically overviews the underlying principles, generation methods, pulse combinations, and cuttingedge applications of this technology, providing valuable theoretical references and technical support for precision manufacturing and new material machining.Progress Ultrafast dual-beam laser microfabrication enables a wide range of applications, including chemical etching, mask-free patterning, optical storage, and micro-drilling(Fig. 1). Critically, ultrafast laser-matter interactions span multiple timescales from electron excitation to thermal diffusion(Fig. 2). The fundamental processing principle lies in the temporal modulation of electron density, where the first pulse pre-conditions the surface to generate seed electrons, and the second pulse undergoes enhanced energy coupling for precise and deep ablation(Fig. 3). Currently, dual beams are primarily generated through three methods. Tunable optical delay lines, utilizing Mach-Zehnder or Michelson interferometers, offer high flexibility in adjusting the delay, polarization, and energy ratio of the dual beams(Fig. 4). Spatiotemporal pulse shaping allows for the programmable generation of complex and customized multi-pulse sequences(Fig. 5). Birefringent crystals provide a highly stable, compact, and collinear passive generation approach, which is ideal for industrial applications(Fig. 6). Based on pulse durations, the combinations are categorized into three main types. Femtosecond-femtosecond combinations are widely used for fabricating large-area periodic surface structures on hard materials like diamond and gold, as well as enhancing chemical etching efficiency(Fig. 7). Femtosecond-picosecond combinations successfully balance efficient electron excitation with mild energy coupling, optimizing microchannel etching and modulating surface structures in semiconductors(Fig. 8). Femtosecond-long pulse(nanosecond or continuous-wave) combinations utilize the ultrafast pulse for defect initiation and the long pulse for thermal ablation, dramatically improving the high-aspect-ratio drilling speed in glass and enabling surface defect repair(Fig. 9).Conclusions and Prospects This paper systematically reviews the fundamental principles and recent advancements in ultrafast dual-beam laser microfabrication technology. By actively intervening in ultrafast electron dynamics, this technology successfully overcomes the limitations of single-pulse processing, offering a highly efficient and controllable approach for high-quality micro/nanostructure fabrication. Although significant progress has been made in theoretical models and experimental methods, future development requires further exploration. Moving forward, research should focus on deepening the understanding of the underlying physical mechanisms through in-situ observation and multiscale modeling. Furthermore, establishing standardized process guidelines and developing modular, industrial-grade dual-beam equipment will be crucial for scaling up production. Finally, the deep integration of this technology with artificial intelligence and machine learning will enable process optimization, real-time feedback control, and predictive manufacturing, driving ultrafast laser microfabrication toward an adaptive and intelligent future.更多还原