【摘要】 真空度的微小变化会对航空航天、半导体制造、医疗器械等领域产生严重影响。光纤真空微负压传感器以其因此，研究一种高精度、高灵敏度、抗环境干扰的真空微负压传感器具有重要的实际意义。但是，光纤传感器的成本仍然成为阻碍其进一步应用的主要原因。针对诸多领域对低成本、尺寸小巧、高可靠性、制备工艺简单的真空微负压传感探头的巨大需求，本文展示了一种基于光纤法布里-珀罗干涉仪(Fabry-Perot Interferometer, FPI)真空微负压传感探针。基于单模光纤(Single mode fiber, SMF)-空芯光纤(Hollow core fiber, HCF)-无芯光纤(No core fiber, NCF)级联结构的FPI光纤微负压传感探针采用定长切割工艺和光纤研磨工艺进行制备，其低光纤成本、工艺简单和高制备效率等特性为其应用于多种领域奠定基础。本文制备的真空微负压光纤传感器样品的灵敏度达到5.07 pm/kPa。本文提出的低成本、工艺简化解决方案为光纤微负压传感器商业化指明了方向。更多还原

【Abstract】 A slight change in vacuum level can have serious impacts on fields such as aerospace, semiconductor manufacturing, and medical devices.Therefore, the study of a high-precision, high-sensitivity, and environmentally resistant vacuum pressure sensor based on the fiber-optic tip is of great practical significance.However, the cost of fiber-optic sensors remains a major obstacle to their further application.In response to the substantial demand for low-cost, small-sized, high-reliability, and simple-to-manufacture vacuum pressure sensing probes in many fields, a Fabry-Perot Interferometer(FPI) vacuum pressure sensing probe is presented in this paper.The FPI fiber-optic vacuum pressure sensing probe based on a cascaded structure of single mode fiber(SMF),hollow core fiber(HCF),and no-core fiber(NCF) is prepared using fixed-length cutting and fiber grinding processes.Its characteristics, including low cost, simplicity of production, and high manufacturing efficiency lay the foundation for its application in multiple fields.The sensitivity of the vacuum micro-negative pressure fiber-optic sensor sample prepared in this paper reaches 5.07 pm/kPa.The low-cost and simplified manufacturing solution proposed in this paper points the way towards the commercialization of fiber optic micro-negative pressure sensors.更多还原